Materials and processes for high k gate stacks: Results from the FEP transition center

C. M. Osburn, S. A. Campbell, A. Demkov, E. Eisenbraun, E. Garfunkel, T. Gustafsson, A. I. Kingon, J. Lee, D. J. Lichtenwalner, G. Lucovsky, T. P. Ma, J. P. Maria, V. Misra, Robert Nemanich, G. N. Parsons, D. G. Schlom, S. Stemmer, R. M. Wallace, J. Whitten

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

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Engineering & Materials Science