Maskless and resist-free rapid prototyping of three-dimensional structures through electron beam induced deposition (EBID) of carbon in combination with metal-assisted chemical etching (MaCE) of silicon
Konrad Rykaczewski, Owen J. Hildreth, Dhaval Kulkarni, Matthew R. Henry, Song Kil Kim, Ching Ping Wong, Vladimir V. Tsukruk, Andrei G. Fedorov
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