Machine qualification management for a semiconductor back-end facility

Mengying Fu; Moeed Haghnevis; Ronald Askin; John Fowler; Muhong Zhang

doi:10.1109/WSC.2010.5678944

Machine qualification management for a semiconductor back-end facility

Mengying Fu, Moeed Haghnevis, Ronald Askin, John Fowler, Muhong Zhang

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

13 Scopus citations

Abstract

In order to process a product in a semiconductor back-end facility, a machine needs to be qualified first by having a product-specific software program installed on it. Then a tool set must be available and attached on the machine while it is processing the product. In general not all machines are qualified to process all products due to the high machine qualification cost and tool set availability. However, the machine qualification decision is very important because it affects capacity allocation in the facility and subsequently affects daily production scheduling. To balance the tradeoff between the machine qualification costs and backorder costs, a product-machine qualification optimization model is proposed in this paper.

Original language	English (US)
Title of host publication	Proceedings of the 2010 Winter Simulation Conference, WSC'10
Pages	2486-2492
Number of pages	7
DOIs	https://doi.org/10.1109/WSC.2010.5678944
State	Published - 2010
Event	2010 43rd Winter Simulation Conference, WSC'10 - Baltimore, MD, United States Duration: Dec 5 2010 → Dec 8 2010

Publication series

Name	Proceedings - Winter Simulation Conference
ISSN (Print)	0891-7736

Other

Other	2010 43rd Winter Simulation Conference, WSC'10
Country/Territory	United States
City	Baltimore, MD
Period	12/5/10 → 12/8/10

ASJC Scopus subject areas

Software
Modeling and Simulation
Computer Science Applications

Access to Document

10.1109/WSC.2010.5678944

Cite this

Fu, M, Haghnevis, M, Askin, R , Fowler, J & Zhang, M 2010, Machine qualification management for a semiconductor back-end facility. in Proceedings of the 2010 Winter Simulation Conference, WSC'10., 5678944, Proceedings - Winter Simulation Conference, pp. 2486-2492, 2010 43rd Winter Simulation Conference, WSC'10, Baltimore, MD, United States, 12/5/10. https://doi.org/10.1109/WSC.2010.5678944

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AB - In order to process a product in a semiconductor back-end facility, a machine needs to be qualified first by having a product-specific software program installed on it. Then a tool set must be available and attached on the machine while it is processing the product. In general not all machines are qualified to process all products due to the high machine qualification cost and tool set availability. However, the machine qualification decision is very important because it affects capacity allocation in the facility and subsequently affects daily production scheduling. To balance the tradeoff between the machine qualification costs and backorder costs, a product-machine qualification optimization model is proposed in this paper.

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Machine qualification management for a semiconductor back-end facility

Abstract

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