Low temperature zinc indium oxide backplane development for flexible OLED displays in a manufacturing pilot line environment

Michael A. Marrs, Sameer M. Venugopal, Curtis D. Moyer, Edward J. Bawolek, Dirk Bottesch, Barry P. O'Brien, Rita J. Cordova, Jovan Trujillo, Cynthia S. Bell, Douglas E. Loy, Gregory Raupp, David Allee

Research output: Chapter in Book/Report/Conference proceedingConference contribution


A low temperature amorphous zinc indium oxide (ZIO) thin film transistor (TFT) backplane technology for high information content flexible organic light emitting diode (OLED) displays has been developed. We have fabricated 4.1-in. diagonal OLED backplanes on the Flexible Display Center's six-inch wafer-scale pilot line using ZIO as the active layer. The ZIO based TFTs exhibited an effective saturation mobility of 18.6 cm 2/V-s and a threshold voltage shift of 2.2 Volts or less under positive and negative gate bias DC stress for 10000 seconds. We report on the critical steps in the evolution of the backplane process: the qualification of the low temperature (200°C) ZIO process, the stability of the devices under forward and reverse bias stress, the transfer of the process to flexible plastic substrates, and the fabrication of white organic light emitting diode (OLED) displays.

Original languageEnglish (US)
Title of host publicationLow-Temperature-Processed Thin-Film Transistors
Number of pages6
StatePublished - Dec 1 2011
Event2010 MRS Fall Meeting - Boston, MA, United States
Duration: Nov 29 2010Dec 3 2010

Publication series

NameMaterials Research Society Symposium Proceedings
ISSN (Print)0272-9172


Other2010 MRS Fall Meeting
CountryUnited States
CityBoston, MA


ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Marrs, M. A., Venugopal, S. M., Moyer, C. D., Bawolek, E. J., Bottesch, D., O'Brien, B. P., Cordova, R. J., Trujillo, J., Bell, C. S., Loy, D. E., Raupp, G., & Allee, D. (2011). Low temperature zinc indium oxide backplane development for flexible OLED displays in a manufacturing pilot line environment. In Low-Temperature-Processed Thin-Film Transistors (pp. 19-24). (Materials Research Society Symposium Proceedings; Vol. 1287). https://doi.org/10.1557/opl.2011.1145