Low temperature zinc indium oxide backplane development for flexible OLED displays in a manufacturing pilot line environment

Michael A. Marrs, Sameer M. Venugopal, Curtis D. Moyer, Edward J. Bawolek, Dirk Bottesch, Barry P. O'Brien, Rita J. Cordova, Jovan Trujillo, Cynthia S. Bell, Douglas E. Loy, Gregory Raupp, David Allee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A low temperature amorphous zinc indium oxide (ZIO) thin film transistor (TFT) backplane technology for high information content flexible organic light emitting diode (OLED) displays has been developed. We have fabricated 4.1-in. diagonal OLED backplanes on the Flexible Display Center's six-inch wafer-scale pilot line using ZIO as the active layer. The ZIO based TFTs exhibited an effective saturation mobility of 18.6 cm 2/V-s and a threshold voltage shift of 2.2 Volts or less under positive and negative gate bias DC stress for 10000 seconds. We report on the critical steps in the evolution of the backplane process: the qualification of the low temperature (200°C) ZIO process, the stability of the devices under forward and reverse bias stress, the transfer of the process to flexible plastic substrates, and the fabrication of white organic light emitting diode (OLED) displays.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium Proceedings
Pages19-24
Number of pages6
Volume1287
DOIs
StatePublished - 2011
Event2010 MRS Fall Meeting - Boston, MA, United States
Duration: Nov 29 2010Dec 3 2010

Other

Other2010 MRS Fall Meeting
CountryUnited States
CityBoston, MA
Period11/29/1012/3/10

Fingerprint

Organic light emitting diodes (OLED)
zinc oxides
indium oxides
Indium
Zinc
light emitting diodes
manufacturing
Display devices
Oxides
Flexible displays
Temperature
qualifications
Thin film transistors
Threshold voltage
threshold voltage
Oxide films
transistors
plastics
direct current
wafers

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering
  • Mechanics of Materials

Cite this

Marrs, M. A., Venugopal, S. M., Moyer, C. D., Bawolek, E. J., Bottesch, D., O'Brien, B. P., ... Allee, D. (2011). Low temperature zinc indium oxide backplane development for flexible OLED displays in a manufacturing pilot line environment. In Materials Research Society Symposium Proceedings (Vol. 1287, pp. 19-24) https://doi.org/10.1557/opl.2011.1145

Low temperature zinc indium oxide backplane development for flexible OLED displays in a manufacturing pilot line environment. / Marrs, Michael A.; Venugopal, Sameer M.; Moyer, Curtis D.; Bawolek, Edward J.; Bottesch, Dirk; O'Brien, Barry P.; Cordova, Rita J.; Trujillo, Jovan; Bell, Cynthia S.; Loy, Douglas E.; Raupp, Gregory; Allee, David.

Materials Research Society Symposium Proceedings. Vol. 1287 2011. p. 19-24.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Marrs, MA, Venugopal, SM, Moyer, CD, Bawolek, EJ, Bottesch, D, O'Brien, BP, Cordova, RJ, Trujillo, J, Bell, CS, Loy, DE, Raupp, G & Allee, D 2011, Low temperature zinc indium oxide backplane development for flexible OLED displays in a manufacturing pilot line environment. in Materials Research Society Symposium Proceedings. vol. 1287, pp. 19-24, 2010 MRS Fall Meeting, Boston, MA, United States, 11/29/10. https://doi.org/10.1557/opl.2011.1145
Marrs MA, Venugopal SM, Moyer CD, Bawolek EJ, Bottesch D, O'Brien BP et al. Low temperature zinc indium oxide backplane development for flexible OLED displays in a manufacturing pilot line environment. In Materials Research Society Symposium Proceedings. Vol. 1287. 2011. p. 19-24 https://doi.org/10.1557/opl.2011.1145
Marrs, Michael A. ; Venugopal, Sameer M. ; Moyer, Curtis D. ; Bawolek, Edward J. ; Bottesch, Dirk ; O'Brien, Barry P. ; Cordova, Rita J. ; Trujillo, Jovan ; Bell, Cynthia S. ; Loy, Douglas E. ; Raupp, Gregory ; Allee, David. / Low temperature zinc indium oxide backplane development for flexible OLED displays in a manufacturing pilot line environment. Materials Research Society Symposium Proceedings. Vol. 1287 2011. pp. 19-24
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