Low-temperature amorphous-silicon backplane technology development for flexible displays in a manufacturing pilot-line environment

Gregory Raupp, Shawn M. O'Rourke, Curt Moyer, Barry P. O'Brien, Scott K. Ageno, Douglas E. Loy, Edward J. Bawolek, David Allee, Sameer M. Venugopal, Jann Kaminski, Dirk Bottesch, Jeff Dailey, Ke Long, Michael Marrs, Nick R. Munizza, Hanna Haverinen, Nicholas Colaneri

Research output: Contribution to journalArticle

49 Scopus citations

Abstract

A low-temperature amorphous-silicon (a-Si:H) thin-film-transistor (TFT) backplane technology for high-information-content flexible displays has been developed. Backplanes were integrated with frontplane technologies to produce high-performance active-matrix reflective electrophoretic ink, reflective cholesteric liquid crystal and emissive OLED flexible-display technology demonstrators (TDs). Backplanes up to 4 in. on the diagonal have been fabricated on a 6-in. wafer-scale pilot line. The critical steps in the evolution of backplane technology, from qualification of baseline low-temperature (180°C) a-Si:H process on the 6-in. line with rigid substrates, to transferring the process to flexible plastic and flexible stainless-steel substrates, to form factor scale-up of the TFT arrays, and finally manufacturing scale-up to a Gen 2 (370 × 470 mm) display-scale pilot line, will be reviewed.

Original languageEnglish (US)
Pages (from-to)445-454
Number of pages10
JournalJournal of the Society for Information Display
Volume15
Issue number7
DOIs
StatePublished - Jul 1 2007

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Keywords

  • Amorphous silicon
  • Backplane electronics
  • Flexible displays
  • Pilot-line manufacturing
  • Thin-film transistors

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

Cite this

Raupp, G., O'Rourke, S. M., Moyer, C., O'Brien, B. P., Ageno, S. K., Loy, D. E., Bawolek, E. J., Allee, D., Venugopal, S. M., Kaminski, J., Bottesch, D., Dailey, J., Long, K., Marrs, M., Munizza, N. R., Haverinen, H., & Colaneri, N. (2007). Low-temperature amorphous-silicon backplane technology development for flexible displays in a manufacturing pilot-line environment. Journal of the Society for Information Display, 15(7), 445-454. https://doi.org/10.1889/1.2759549