Low noise TES array for the short wavelength band of the SAFARI instrument on SPICA

P. Khosropanah, R. Hijmering, M. Ridder, M. A. Lindeman, L. Gottardi, M. Bruijn, J. Van Der Kuur, J. R. Gao, B. D. Jackson, H. Hoevers, D. Morozov, P. D. Mauskopf

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

SPICA is an infra-red (IR) telescope with a cryogenically cooled mirror (∼5K) with three instruments on board, one of which is SAFARI that is an imaging Fourier Transform Spectrometer (FTS) with three bands covering the wavelength of 34-210 μm. We develop transition edge sensors (TES) array for short wavelength band (34-60 um) of SAFARI. These are based on superconducting Ti/Au bilayer as TES bolometers with a Tc of about 105 mK and thin Ta film as IR absorbers on suspended silicon nitride (SiN) membranes. These membranes are supported by long and narrow SiN legs that act as weak thermal links between the TES and the bath. Previously an electrical noise equivalent power (NEP) of 4×10-19 W/√Hz was achieved for a single pixel of such detectors. As an intermediate step toward a full-size SAFARI array (43×43), we fabricated several 8×9 detector arrays. Here we describe the design and the outcome of the dark and optical tests of several of these devices. We achieved high yield (>93%) and high uniformity in terms of critical temperature (<5%) and normal resistance (7%) across the arrays. The measured dark NEPs are as low as 5×10-1 W/VHz with a response time of about 1.4 ms at preferred operating bias point.

Original languageEnglish (US)
Title of host publication23rd International Symposium on Space Terahertz Technology 2012, ISSTT 2012
Pages185-188
Number of pages4
StatePublished - Dec 1 2012
Externally publishedYes
Event23rd International Symposium on Space Terahertz Technology 2012, ISSTT 2012 - Tokyo, Japan
Duration: Apr 2 2012Apr 4 2012

Publication series

Name23rd International Symposium on Space Terahertz Technology 2012, ISSTT 2012

Other

Other23rd International Symposium on Space Terahertz Technology 2012, ISSTT 2012
CountryJapan
CityTokyo
Period4/2/124/4/12

Keywords

  • Far infra-red spectrometer
  • SiN membrane
  • Submm spectrometer
  • TES
  • Transition-edge sensor

ASJC Scopus subject areas

  • Computer Networks and Communications

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    Khosropanah, P., Hijmering, R., Ridder, M., Lindeman, M. A., Gottardi, L., Bruijn, M., Van Der Kuur, J., Gao, J. R., Jackson, B. D., Hoevers, H., Morozov, D., & Mauskopf, P. D. (2012). Low noise TES array for the short wavelength band of the SAFARI instrument on SPICA. In 23rd International Symposium on Space Terahertz Technology 2012, ISSTT 2012 (pp. 185-188). (23rd International Symposium on Space Terahertz Technology 2012, ISSTT 2012).