Low-cost spray deposited ZrO2 for passivation and antireflection on p-type Si

Woo Jung Shin, Laidong Wang, Meng Tao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this study, we use low-cost spray deposition to study the possibility of using an earth-abundant ZrO2 film as a antireflection and passivation layer on p-type Si. Structural, optical and electrical properties of the spray-deposited ZrO2 film were investigated. Spray deposited ZrO2 is highly transparent with a refractive index of 2 at 600 nm wavelength. Reflectance and transmittance spectra of ZrO2 films reveal that the optical properties of spray-deposited ZrO2 are comparable to, and in some cases slightly better than, PECVD SiNx. Capacitance- voltage measurements show that spray-deposited ZrO2 films have negative charges with a charge density of 1.07×1012 cm-2. These results suggest that spray-deposited ZrO2 could be a suitable material for antireflection and passivation on p-type Si in Si solar cells.

Original languageEnglish (US)
Title of host publication2017 IEEE 44th Photovoltaic Specialist Conference, PVSC 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1-4
Number of pages4
ISBN (Electronic)9781509056057
DOIs
StatePublished - May 25 2018
Event44th IEEE Photovoltaic Specialist Conference, PVSC 2017 - Washington, United States
Duration: Jun 25 2017Jun 30 2017

Other

Other44th IEEE Photovoltaic Specialist Conference, PVSC 2017
CountryUnited States
CityWashington
Period6/25/176/30/17

Fingerprint

Passivation
Costs
Optical properties
Capacitance measurement
Voltage measurement
Plasma enhanced chemical vapor deposition
Charge density
Structural properties
Refractive index
Solar cells
Electric properties
Earth (planet)
Wavelength

ASJC Scopus subject areas

  • Renewable Energy, Sustainability and the Environment
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Shin, W. J., Wang, L., & Tao, M. (2018). Low-cost spray deposited ZrO2 for passivation and antireflection on p-type Si. In 2017 IEEE 44th Photovoltaic Specialist Conference, PVSC 2017 (pp. 1-4). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/PVSC.2017.8366703

Low-cost spray deposited ZrO2 for passivation and antireflection on p-type Si. / Shin, Woo Jung; Wang, Laidong; Tao, Meng.

2017 IEEE 44th Photovoltaic Specialist Conference, PVSC 2017. Institute of Electrical and Electronics Engineers Inc., 2018. p. 1-4.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Shin, WJ, Wang, L & Tao, M 2018, Low-cost spray deposited ZrO2 for passivation and antireflection on p-type Si. in 2017 IEEE 44th Photovoltaic Specialist Conference, PVSC 2017. Institute of Electrical and Electronics Engineers Inc., pp. 1-4, 44th IEEE Photovoltaic Specialist Conference, PVSC 2017, Washington, United States, 6/25/17. https://doi.org/10.1109/PVSC.2017.8366703
Shin WJ, Wang L, Tao M. Low-cost spray deposited ZrO2 for passivation and antireflection on p-type Si. In 2017 IEEE 44th Photovoltaic Specialist Conference, PVSC 2017. Institute of Electrical and Electronics Engineers Inc. 2018. p. 1-4 https://doi.org/10.1109/PVSC.2017.8366703
Shin, Woo Jung ; Wang, Laidong ; Tao, Meng. / Low-cost spray deposited ZrO2 for passivation and antireflection on p-type Si. 2017 IEEE 44th Photovoltaic Specialist Conference, PVSC 2017. Institute of Electrical and Electronics Engineers Inc., 2018. pp. 1-4
@inproceedings{5baf13c3b4a948b4a9dcf69ec41bf645,
title = "Low-cost spray deposited ZrO2 for passivation and antireflection on p-type Si",
abstract = "In this study, we use low-cost spray deposition to study the possibility of using an earth-abundant ZrO2 film as a antireflection and passivation layer on p-type Si. Structural, optical and electrical properties of the spray-deposited ZrO2 film were investigated. Spray deposited ZrO2 is highly transparent with a refractive index of 2 at 600 nm wavelength. Reflectance and transmittance spectra of ZrO2 films reveal that the optical properties of spray-deposited ZrO2 are comparable to, and in some cases slightly better than, PECVD SiNx. Capacitance- voltage measurements show that spray-deposited ZrO2 films have negative charges with a charge density of 1.07×1012 cm-2. These results suggest that spray-deposited ZrO2 could be a suitable material for antireflection and passivation on p-type Si in Si solar cells.",
author = "Shin, {Woo Jung} and Laidong Wang and Meng Tao",
year = "2018",
month = "5",
day = "25",
doi = "10.1109/PVSC.2017.8366703",
language = "English (US)",
pages = "1--4",
booktitle = "2017 IEEE 44th Photovoltaic Specialist Conference, PVSC 2017",
publisher = "Institute of Electrical and Electronics Engineers Inc.",

}

TY - GEN

T1 - Low-cost spray deposited ZrO2 for passivation and antireflection on p-type Si

AU - Shin, Woo Jung

AU - Wang, Laidong

AU - Tao, Meng

PY - 2018/5/25

Y1 - 2018/5/25

N2 - In this study, we use low-cost spray deposition to study the possibility of using an earth-abundant ZrO2 film as a antireflection and passivation layer on p-type Si. Structural, optical and electrical properties of the spray-deposited ZrO2 film were investigated. Spray deposited ZrO2 is highly transparent with a refractive index of 2 at 600 nm wavelength. Reflectance and transmittance spectra of ZrO2 films reveal that the optical properties of spray-deposited ZrO2 are comparable to, and in some cases slightly better than, PECVD SiNx. Capacitance- voltage measurements show that spray-deposited ZrO2 films have negative charges with a charge density of 1.07×1012 cm-2. These results suggest that spray-deposited ZrO2 could be a suitable material for antireflection and passivation on p-type Si in Si solar cells.

AB - In this study, we use low-cost spray deposition to study the possibility of using an earth-abundant ZrO2 film as a antireflection and passivation layer on p-type Si. Structural, optical and electrical properties of the spray-deposited ZrO2 film were investigated. Spray deposited ZrO2 is highly transparent with a refractive index of 2 at 600 nm wavelength. Reflectance and transmittance spectra of ZrO2 films reveal that the optical properties of spray-deposited ZrO2 are comparable to, and in some cases slightly better than, PECVD SiNx. Capacitance- voltage measurements show that spray-deposited ZrO2 films have negative charges with a charge density of 1.07×1012 cm-2. These results suggest that spray-deposited ZrO2 could be a suitable material for antireflection and passivation on p-type Si in Si solar cells.

UR - http://www.scopus.com/inward/record.url?scp=85048515699&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85048515699&partnerID=8YFLogxK

U2 - 10.1109/PVSC.2017.8366703

DO - 10.1109/PVSC.2017.8366703

M3 - Conference contribution

AN - SCOPUS:85048515699

SP - 1

EP - 4

BT - 2017 IEEE 44th Photovoltaic Specialist Conference, PVSC 2017

PB - Institute of Electrical and Electronics Engineers Inc.

ER -