Low-cost spray deposited ZrO2 for passivation and antireflection on p-type Si

Woo Jung Shin, Laidong Wang, Meng Tao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this study, we use low-cost spray deposition to study the possibility of using an earth-abundant ZrO2 film as a antireflection and passivation layer on p-type Si. Structural, optical and electrical properties of the spray-deposited ZrO2 film were investigated. Spray deposited ZrO2 is highly transparent with a refractive index of 2 at 600 nm wavelength. Reflectance and transmittance spectra of ZrO2 films reveal that the optical properties of spray-deposited ZrO2 are comparable to, and in some cases slightly better than, PECVD SiNx. Capacitance- voltage measurements show that spray-deposited ZrO2 films have negative charges with a charge density of 1.07×1012 cm-2. These results suggest that spray-deposited ZrO2 could be a suitable material for antireflection and passivation on p-type Si in Si solar cells.

Original languageEnglish (US)
Title of host publication2017 IEEE 44th Photovoltaic Specialist Conference, PVSC 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1-4
Number of pages4
ISBN (Electronic)9781509056057
DOIs
StatePublished - May 25 2018
Event44th IEEE Photovoltaic Specialist Conference, PVSC 2017 - Washington, United States
Duration: Jun 25 2017Jun 30 2017

Other

Other44th IEEE Photovoltaic Specialist Conference, PVSC 2017
CountryUnited States
CityWashington
Period6/25/176/30/17

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ASJC Scopus subject areas

  • Renewable Energy, Sustainability and the Environment
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Shin, W. J., Wang, L., & Tao, M. (2018). Low-cost spray deposited ZrO2 for passivation and antireflection on p-type Si. In 2017 IEEE 44th Photovoltaic Specialist Conference, PVSC 2017 (pp. 1-4). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/PVSC.2017.8366703