Low-cost spray deposited ZrO2 for passivation and antireflection on p-type Si

Woo Jung Shin, Laidong Wang, Meng Tao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this study, we use low-cost spray deposition to study the possibility of using an earth-abundant ZrO2 film as a antireflection and passivation layer on p-type Si. Structural, optical and electrical properties of the spray-deposited ZrO2 film were investigated. Spray deposited ZrO2 is highly transparent with a refractive index of 2 at 600 nm wavelength. Reflectance and transmittance spectra of ZrO2 films reveal that the optical properties of spray-deposited ZrO2 are comparable to, and in some cases slightly better than, PECVD SiNx. Capacitance-voltage measurements show that spray-deposited ZrO2 films have negative charges with a charge density of 1.07×1012 cm-2. These results suggest that spray-deposited ZrO2 could be a suitable material for antireflection and passivation on p-type Si in Si solar cells.

Original languageEnglish (US)
Title of host publication2016 IEEE 43rd Photovoltaic Specialists Conference, PVSC 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages2971-2974
Number of pages4
Volume2016-November
ISBN (Electronic)9781509027248
DOIs
StatePublished - Nov 18 2016
Event43rd IEEE Photovoltaic Specialists Conference, PVSC 2016 - Portland, United States
Duration: Jun 5 2016Jun 10 2016

Other

Other43rd IEEE Photovoltaic Specialists Conference, PVSC 2016
CountryUnited States
CityPortland
Period6/5/166/10/16

Fingerprint

Passivation
Costs
Optical properties
Capacitance measurement
Voltage measurement
Plasma enhanced chemical vapor deposition
Charge density
Structural properties
Refractive index
Solar cells
Electric properties
Earth (planet)
Wavelength

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

Cite this

Shin, W. J., Wang, L., & Tao, M. (2016). Low-cost spray deposited ZrO2 for passivation and antireflection on p-type Si. In 2016 IEEE 43rd Photovoltaic Specialists Conference, PVSC 2016 (Vol. 2016-November, pp. 2971-2974). [7750206] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/PVSC.2016.7750206

Low-cost spray deposited ZrO2 for passivation and antireflection on p-type Si. / Shin, Woo Jung; Wang, Laidong; Tao, Meng.

2016 IEEE 43rd Photovoltaic Specialists Conference, PVSC 2016. Vol. 2016-November Institute of Electrical and Electronics Engineers Inc., 2016. p. 2971-2974 7750206.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Shin, WJ, Wang, L & Tao, M 2016, Low-cost spray deposited ZrO2 for passivation and antireflection on p-type Si. in 2016 IEEE 43rd Photovoltaic Specialists Conference, PVSC 2016. vol. 2016-November, 7750206, Institute of Electrical and Electronics Engineers Inc., pp. 2971-2974, 43rd IEEE Photovoltaic Specialists Conference, PVSC 2016, Portland, United States, 6/5/16. https://doi.org/10.1109/PVSC.2016.7750206
Shin WJ, Wang L, Tao M. Low-cost spray deposited ZrO2 for passivation and antireflection on p-type Si. In 2016 IEEE 43rd Photovoltaic Specialists Conference, PVSC 2016. Vol. 2016-November. Institute of Electrical and Electronics Engineers Inc. 2016. p. 2971-2974. 7750206 https://doi.org/10.1109/PVSC.2016.7750206
Shin, Woo Jung ; Wang, Laidong ; Tao, Meng. / Low-cost spray deposited ZrO2 for passivation and antireflection on p-type Si. 2016 IEEE 43rd Photovoltaic Specialists Conference, PVSC 2016. Vol. 2016-November Institute of Electrical and Electronics Engineers Inc., 2016. pp. 2971-2974
@inproceedings{7423ac7a9ab346a3b914ca2c667a5ae3,
title = "Low-cost spray deposited ZrO2 for passivation and antireflection on p-type Si",
abstract = "In this study, we use low-cost spray deposition to study the possibility of using an earth-abundant ZrO2 film as a antireflection and passivation layer on p-type Si. Structural, optical and electrical properties of the spray-deposited ZrO2 film were investigated. Spray deposited ZrO2 is highly transparent with a refractive index of 2 at 600 nm wavelength. Reflectance and transmittance spectra of ZrO2 films reveal that the optical properties of spray-deposited ZrO2 are comparable to, and in some cases slightly better than, PECVD SiNx. Capacitance-voltage measurements show that spray-deposited ZrO2 films have negative charges with a charge density of 1.07×1012 cm-2. These results suggest that spray-deposited ZrO2 could be a suitable material for antireflection and passivation on p-type Si in Si solar cells.",
author = "Shin, {Woo Jung} and Laidong Wang and Meng Tao",
year = "2016",
month = "11",
day = "18",
doi = "10.1109/PVSC.2016.7750206",
language = "English (US)",
volume = "2016-November",
pages = "2971--2974",
booktitle = "2016 IEEE 43rd Photovoltaic Specialists Conference, PVSC 2016",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
address = "United States",

}

TY - GEN

T1 - Low-cost spray deposited ZrO2 for passivation and antireflection on p-type Si

AU - Shin, Woo Jung

AU - Wang, Laidong

AU - Tao, Meng

PY - 2016/11/18

Y1 - 2016/11/18

N2 - In this study, we use low-cost spray deposition to study the possibility of using an earth-abundant ZrO2 film as a antireflection and passivation layer on p-type Si. Structural, optical and electrical properties of the spray-deposited ZrO2 film were investigated. Spray deposited ZrO2 is highly transparent with a refractive index of 2 at 600 nm wavelength. Reflectance and transmittance spectra of ZrO2 films reveal that the optical properties of spray-deposited ZrO2 are comparable to, and in some cases slightly better than, PECVD SiNx. Capacitance-voltage measurements show that spray-deposited ZrO2 films have negative charges with a charge density of 1.07×1012 cm-2. These results suggest that spray-deposited ZrO2 could be a suitable material for antireflection and passivation on p-type Si in Si solar cells.

AB - In this study, we use low-cost spray deposition to study the possibility of using an earth-abundant ZrO2 film as a antireflection and passivation layer on p-type Si. Structural, optical and electrical properties of the spray-deposited ZrO2 film were investigated. Spray deposited ZrO2 is highly transparent with a refractive index of 2 at 600 nm wavelength. Reflectance and transmittance spectra of ZrO2 films reveal that the optical properties of spray-deposited ZrO2 are comparable to, and in some cases slightly better than, PECVD SiNx. Capacitance-voltage measurements show that spray-deposited ZrO2 films have negative charges with a charge density of 1.07×1012 cm-2. These results suggest that spray-deposited ZrO2 could be a suitable material for antireflection and passivation on p-type Si in Si solar cells.

UR - http://www.scopus.com/inward/record.url?scp=85003678371&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85003678371&partnerID=8YFLogxK

U2 - 10.1109/PVSC.2016.7750206

DO - 10.1109/PVSC.2016.7750206

M3 - Conference contribution

VL - 2016-November

SP - 2971

EP - 2974

BT - 2016 IEEE 43rd Photovoltaic Specialists Conference, PVSC 2016

PB - Institute of Electrical and Electronics Engineers Inc.

ER -