Abstract
In this study, we use low-cost spray deposition to study the possibility of using an earth-abundant ZrO2 film as a antireflection and passivation layer on p-type Si. Structural, optical and electrical properties of the spray-deposited ZrO2 film were investigated. Spray deposited ZrO2 is highly transparent with a refractive index of 2 at 600 nm wavelength. Reflectance and transmittance spectra of ZrO2 films reveal that the optical properties of spray-deposited ZrO2 are comparable to, and in some cases slightly better than, PECVD SiNx. Capacitance-voltage measurements show that spray-deposited ZrO2 films have negative charges with a charge density of 1.07×1012 cm-2. These results suggest that spray-deposited ZrO2 could be a suitable material for antireflection and passivation on p-type Si in Si solar cells.
Original language | English (US) |
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Title of host publication | 2016 IEEE 43rd Photovoltaic Specialists Conference, PVSC 2016 |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Pages | 2971-2974 |
Number of pages | 4 |
Volume | 2016-November |
ISBN (Electronic) | 9781509027248 |
DOIs | |
State | Published - Nov 18 2016 |
Event | 43rd IEEE Photovoltaic Specialists Conference, PVSC 2016 - Portland, United States Duration: Jun 5 2016 → Jun 10 2016 |
Other
Other | 43rd IEEE Photovoltaic Specialists Conference, PVSC 2016 |
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Country/Territory | United States |
City | Portland |
Period | 6/5/16 → 6/10/16 |
ASJC Scopus subject areas
- Control and Systems Engineering
- Industrial and Manufacturing Engineering
- Electrical and Electronic Engineering