In this study, we use low-cost spray deposition to study the possibility of using an earth-abundant ZrO 2 film as a antireflection and passivation layer on p-type Si. Structural, optical and electrical properties of the spray-deposited ZrO2 film were investigated. Spray deposited ZrO 2 is highly transparent with a refractive index of 2 at 600 nm wavelength. Reflectance and transmittance spectra of ZrO2 films reveal that the optical properties of spray-deposited ZrO 2 are comparable to, and in some cases slightly better than, PECVD SiNx. Capacitance- voltage measurements show that spray-deposited ZrO2 films have negative charges with a charge density of 1.07×10 12 cm -2 . These results suggest that spray-deposited ZrO 2 could be a suitable material for antireflection and passivation on p-type Si in Si solar cells.