Abstract

Low-cost spray deposition is employed to investigate the possibility of using earth-abundant ZrO 2 as the antireflection coating in Si solar cells. Structural, optical, and electrical properties of spray-deposited ZrO 2 films are investigated. Spray-deposited ZrO 2 is highly transparent with a refractive index of 2.0 at 600 nm. Reflection and transmission spectra of ZrO 2 films reveal that the optical properties of spray-deposited ZrO 2 are comparable to SiN x deposited by plasma-enhanced chemical vapor deposition. Atomic force microscopy studies show that spray-deposited ZrO 2 is crack/pore-free and its surface roughness has a root-mean-square value of 0.7 nm for a 75-nm film. Spray-deposited ZrO 2 at 550 °C is polycrystalline with a cubic lattice but largely amorphous at 450 °C as determined by X-ray diffraction. Capacitance-voltage measurements indicate that spray-deposited ZrO 2 has a negative charge density of 8.19 × 10 11 cm −2 for a 75-nm film. Post-deposition annealing results in a significant decrease in oxide capacitance which is attributed to the formation of SiO 2 at the ZrO 2 /Si interface. The resistivity of as-deposited ZrO 2 is 3.69 × 10 12 Ω-cm and it improves to 2.46 × 10 13 Ω-cm after post-deposition annealing in air at 600 °C for 1 h.

Original languageEnglish (US)
Pages (from-to)37-43
Number of pages7
JournalMaterials Chemistry and Physics
Volume230
DOIs
StatePublished - May 15 2019

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sprayers
Solar cells
solar cells
Costs
Optical properties
Annealing
Antireflection coatings
Capacitance measurement
Voltage measurement
Plasma enhanced chemical vapor deposition
Charge density
Oxides
Structural properties
capacitance
Atomic force microscopy
Refractive index
Electric properties
Capacitance
Surface roughness
Earth (planet)

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics

Cite this

Low-cost spray-deposited ZrO 2 for antireflection in Si solar cells . / Shin, Woo Jung; Huang, Wen Hsi; Tao, Meng.

In: Materials Chemistry and Physics, Vol. 230, 15.05.2019, p. 37-43.

Research output: Contribution to journalArticle

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abstract = "Low-cost spray deposition is employed to investigate the possibility of using earth-abundant ZrO 2 as the antireflection coating in Si solar cells. Structural, optical, and electrical properties of spray-deposited ZrO 2 films are investigated. Spray-deposited ZrO 2 is highly transparent with a refractive index of 2.0 at 600 nm. Reflection and transmission spectra of ZrO 2 films reveal that the optical properties of spray-deposited ZrO 2 are comparable to SiN x deposited by plasma-enhanced chemical vapor deposition. Atomic force microscopy studies show that spray-deposited ZrO 2 is crack/pore-free and its surface roughness has a root-mean-square value of 0.7 nm for a 75-nm film. Spray-deposited ZrO 2 at 550 °C is polycrystalline with a cubic lattice but largely amorphous at 450 °C as determined by X-ray diffraction. Capacitance-voltage measurements indicate that spray-deposited ZrO 2 has a negative charge density of 8.19 × 10 11 cm −2 for a 75-nm film. Post-deposition annealing results in a significant decrease in oxide capacitance which is attributed to the formation of SiO 2 at the ZrO 2 /Si interface. The resistivity of as-deposited ZrO 2 is 3.69 × 10 12 Ω-cm and it improves to 2.46 × 10 13 Ω-cm after post-deposition annealing in air at 600 °C for 1 h.",
author = "Shin, {Woo Jung} and Huang, {Wen Hsi} and Meng Tao",
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