Locally Adaptive Statistical Background Modeling with Deep Learning-Based False Positive Rejection for Defect Detection in Semiconductor Units

Physics & Astronomy

• learning 79%
• rejection 76%
• defects 40%
• proposals 16%
• change detection 14%
• classifiers 12%
• illuminating 8%
• manufacturing 7%
• color 6%

Chemical Compounds

• Classifier 100%
• Statistical Ensemble 72%
• Semiconductor 55%

Engineering & Materials Science

• Deep learning 65%
• Semiconductor materials 64%
• Defects 49%
• Deep neural networks 8%
• Lighting 7%
• Color 6%
• Classifiers 6%
• Substrates 6%