Local measurement and computational refinement of aberrations for HRTEM

Angus I. Kirkland, Rüdiger R. Meyer, Lan Yun Shery Chang

Research output: Contribution to journalArticle

21 Scopus citations

Abstract

Methods for accurate and automated determination of the coefficients of the wave aberration function are compared with particular emphasis on measurements of higher order coefficients in corrected instruments. Experimental applications of aberration measurement to the determination of illumination isoplanicity and high precision local refinement of restored exit waves are also described.

Original languageEnglish (US)
Pages (from-to)461-468
Number of pages8
JournalMicroscopy and Microanalysis
Volume12
Issue number6
DOIs
StatePublished - Dec 1 2006
Externally publishedYes

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Keywords

  • Aberration measurement
  • High resolution electron microscopy

ASJC Scopus subject areas

  • Instrumentation

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