Local measurement and computational refinement of aberrations for HRTEM

Angus I. Kirkland; Rüdiger R. Meyer; Lan Yun Shery Chang

doi:10.1017/S1431927606060612

Local measurement and computational refinement of aberrations for HRTEM

Angus I. Kirkland, Rüdiger R. Meyer, Lan Yun Shery Chang

Research output: Contribution to journal › Article › peer-review

23 Scopus citations

Abstract

Methods for accurate and automated determination of the coefficients of the wave aberration function are compared with particular emphasis on measurements of higher order coefficients in corrected instruments. Experimental applications of aberration measurement to the determination of illumination isoplanicity and high precision local refinement of restored exit waves are also described.

Original language	English (US)
Pages (from-to)	461-468
Number of pages	8
Journal	Microscopy and Microanalysis
Volume	12
Issue number	6
DOIs	https://doi.org/10.1017/S1431927606060612
State	Published - Dec 1 2006
Externally published	Yes

Keywords

Aberration measurement
High resolution electron microscopy

ASJC Scopus subject areas

Instrumentation

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10.1017/S1431927606060612

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title = "Local measurement and computational refinement of aberrations for HRTEM",

abstract = "Methods for accurate and automated determination of the coefficients of the wave aberration function are compared with particular emphasis on measurements of higher order coefficients in corrected instruments. Experimental applications of aberration measurement to the determination of illumination isoplanicity and high precision local refinement of restored exit waves are also described.",

keywords = "Aberration measurement, High resolution electron microscopy",

author = "Kirkland, {Angus I.} and Meyer, {R{\"u}diger R.} and Chang, {Lan Yun Shery}",

year = "2006",

month = dec,

day = "1",

doi = "10.1017/S1431927606060612",

language = "English (US)",

volume = "12",

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journal = "Microscopy and Microanalysis",

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publisher = "Cambridge University Press",

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T1 - Local measurement and computational refinement of aberrations for HRTEM

AU - Kirkland, Angus I.

AU - Meyer, Rüdiger R.

AU - Chang, Lan Yun Shery

PY - 2006/12/1

Y1 - 2006/12/1

N2 - Methods for accurate and automated determination of the coefficients of the wave aberration function are compared with particular emphasis on measurements of higher order coefficients in corrected instruments. Experimental applications of aberration measurement to the determination of illumination isoplanicity and high precision local refinement of restored exit waves are also described.

AB - Methods for accurate and automated determination of the coefficients of the wave aberration function are compared with particular emphasis on measurements of higher order coefficients in corrected instruments. Experimental applications of aberration measurement to the determination of illumination isoplanicity and high precision local refinement of restored exit waves are also described.

KW - Aberration measurement

KW - High resolution electron microscopy

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AN - SCOPUS:33947504493

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JO - Microscopy and Microanalysis

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IS - 6

ER -

Local measurement and computational refinement of aberrations for HRTEM

Abstract

Keywords

ASJC Scopus subject areas

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