Local electric field direct writing – Electron-beam lithography and mechanism

Nan Jiang, Dong Su, John Spence

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Fingerprint

Dive into the research topics of 'Local electric field direct writing – Electron-beam lithography and mechanism'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds