Linear, high-resolution bioMEMS force sensors with large measurement range

J. Rajagopalan, A. Tofangchi, M.T. A. Saif

Research output: Contribution to journalArticle

25 Scopus citations
Original languageEnglish
Pages (from-to)1380-1389
JournalJournal of Microelectromechanical Systems
Volume19
StatePublished - 2010

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