Linear, high-resolution bioMEMS force sensors with large measurement range

J. Rajagopalan, A. Tofangchi, M.T. A. Saif

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	1380-1389
Journal	Journal of Microelectromechanical Systems
Volume	19
State	Published - 2010

Cite this

@article{609f4c834f8a4e7793a5421a0d080984,

title = "Linear, high-resolution bioMEMS force sensors with large measurement range",

author = "J. Rajagopalan and A. Tofangchi and Saif, {M.T. A.}",

year = "2010",

language = "English",

volume = "19",

pages = "1380--1389",

journal = "Journal of Microelectromechanical Systems",

issn = "1057-7157",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

}