Levels of capacity and material handling system modeling for factory integration decision making in semiconductor wafer fabs

Physics & Astronomy

• materials handling 100%
• decision making 81%
• industrial plants 65%
• wafers 46%
• classifying 5%
• planning 4%
• costs 3%
• cycles 3%
• estimates 2%
• performance 2%
• interactions 1%
• simulation 1%

Engineering & Materials Science

• Materials handling 70%
• Industrial plants 56%
• Semiconductor materials 54%
• Decision making 44%
• Program processors 3%
• Planning 2%
• Costs 1%
• Experiments 1%

Chemical Compounds

• Material Handling 97%
• Semiconductor 46%
• Time 4%
• Simulation 3%
• Amount 2%