Lateral-Type Field Emission-Based Magnetic Sensor Fabricated by Electron-Beam Lithography

Engineering & Materials Science

• Electron beam lithography 100%
• Magnetic sensors 84%
• Field emission 82%
• Anodes 62%
• Magnetic fields 56%
• Electrons 48%
• Field effect transistors 34%
• Electrodes 24%
• Lorentz force 22%
• Microelectronics 17%
• Vacuum 14%
• Silicon 12%
• Electric potential 8%

Physics & Astronomy

• field emission 58%
• lithography 53%
• electron beams 46%
• anodes 44%
• sensors 39%
• magnetic fields 25%
• field effect transistors 20%
• electrons 16%
• electrodes 16%
• sensitivity 15%
• Lorentz force 14%
• microelectronics 13%
• deflection 11%
• emitters 10%
• solid state 9%
• vacuum 8%
• electric potential 6%
• silicon 6%

Chemical Compounds

• Electron Beam 70%
• Magnetic Field 60%
• Anode 47%
• Field Emission 32%
• Field Effect 32%
• Gate Potential 28%
• Electron Particle 26%
• Microelectronics 18%
• Behavior as Electrode 16%
• Vacuum 12%
• Voltage 11%
• Force 10%
• Time 5%