TY - GEN
T1 - Laser shock induced nano-patterning of graphene
AU - Li, Ji
AU - Cheng, Gary J.
AU - Zhang, Rongjun
AU - Jiang, Hanqing
PY - 2012
Y1 - 2012
N2 - Nano-patterning of graphene film by a novel approach making use of laser ablation generated pressure is presented in this paper. Arrays of nanoscale holes were fabricated by applying laser shock pressure on graphene film suspending on well trenches in silicon substrate. Round holes with diameters ranging from 50 to 200 nm on graphene film were successfully punched. The critical pressure was found to be dependent on the diameter of holes. Smaller the diameters, higher critical pressure, which was also captured by the molecular dynamic (MD) simulations. The laser shock based approach presented in this paper provides an effective way to pattern graphene film with nanoscale features at an easy, fast and scalable manner.
AB - Nano-patterning of graphene film by a novel approach making use of laser ablation generated pressure is presented in this paper. Arrays of nanoscale holes were fabricated by applying laser shock pressure on graphene film suspending on well trenches in silicon substrate. Round holes with diameters ranging from 50 to 200 nm on graphene film were successfully punched. The critical pressure was found to be dependent on the diameter of holes. Smaller the diameters, higher critical pressure, which was also captured by the molecular dynamic (MD) simulations. The laser shock based approach presented in this paper provides an effective way to pattern graphene film with nanoscale features at an easy, fast and scalable manner.
UR - http://www.scopus.com/inward/record.url?scp=84883085847&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84883085847&partnerID=8YFLogxK
U2 - 10.1115/MSEC2012-7378
DO - 10.1115/MSEC2012-7378
M3 - Conference contribution
AN - SCOPUS:84883085847
SN - 9780791854990
T3 - ASME 2012 International Manufacturing Science and Engineering Conference Collocated with the 40th North American Manufacturing Research Conference and in Participation with the Int. Conf., MSEC 2012
SP - 545
EP - 551
BT - ASME 2012 International Manufacturing Science and Engineering Conference Collocated with the 40th North American Manufacturing Research Conf. and in Participation with the Int. Conf., MSEC 2012
T2 - ASME 2012 International Manufacturing Science and Engineering Conference, MSEC 2012 Collocated with the 40th North American Manufacturing Research Conference and in Participation with the International Conference
Y2 - 4 June 2012 through 8 June 2012
ER -