Abstract

Nano-patterning of graphene film by a novel approach making use of laser ablation generated pressure is presented in this paper. Arrays of nanoscale holes were fabricated by applying laser shock pressure on graphene film suspending on well trenches in silicon substrate. Round holes with diameters ranging from 50 to 200 nm on graphene film were successfully punched. The critical pressure was found to be dependent on the diameter of holes. Smaller the diameters, higher critical pressure, which was also captured by the molecular dynamic (MD) simulations. The laser shock based approach presented in this paper provides an effective way to pattern graphene film with nanoscale features at an easy, fast and scalable manner.

Original languageEnglish (US)
Title of host publicationASME 2012 International Manufacturing Science and Engineering Conference Collocated with the 40th North American Manufacturing Research Conf. and in Participation with the Int. Conf., MSEC 2012
Pages545-551
Number of pages7
DOIs
StatePublished - Dec 1 2012
EventASME 2012 International Manufacturing Science and Engineering Conference, MSEC 2012 Collocated with the 40th North American Manufacturing Research Conference and in Participation with the International Conference - Notre Dame, IN, United States
Duration: Jun 4 2012Jun 8 2012

Publication series

NameASME 2012 International Manufacturing Science and Engineering Conference Collocated with the 40th North American Manufacturing Research Conference and in Participation with the Int. Conf., MSEC 2012

Other

OtherASME 2012 International Manufacturing Science and Engineering Conference, MSEC 2012 Collocated with the 40th North American Manufacturing Research Conference and in Participation with the International Conference
CountryUnited States
CityNotre Dame, IN
Period6/4/126/8/12

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

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  • Cite this

    Li, J., Cheng, G. J., Zhang, R., & Jiang, H. (2012). Laser shock induced nano-patterning of graphene. In ASME 2012 International Manufacturing Science and Engineering Conference Collocated with the 40th North American Manufacturing Research Conf. and in Participation with the Int. Conf., MSEC 2012 (pp. 545-551). (ASME 2012 International Manufacturing Science and Engineering Conference Collocated with the 40th North American Manufacturing Research Conference and in Participation with the Int. Conf., MSEC 2012). https://doi.org/10.1115/MSEC2012-7378