Laser micromachining of silicon: A new technique for fabricating terahertz imaging arrays

Christopher K. Walker, Aimee L. Hungerford, Gopal Narayanan, Christopher E. Groppi, Theodore M. Bloomstein, Stephen T. Palmacci, Margaret B. Stern, Jane E. Curtin

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Scopus citations

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Mathematics

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