Large area plan-view transmission electron microscopy sample preparation for multijunction metamorphic solar cell devices

M. J. Jackson, B. L. Jackson, N. Bodzin, A. Zakaira, X. Q. Liu, R. R. King, M. S. Goorsky

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A focused ion beam (FIB) sample preparation technique is developed to produce very large areas of electron transparent material for plan-view transmission electron microscopy measurements from specific layers in a multi-layer device structure. An initial cross section FIB cut allows plan-view sample creation from any layer of interest, and therefore rapid characterization of the defect density as a function of depth is achievable for structures containing multiple layers, such as multi-junction metamorphic layer structures for high efficiency III-V solar cells. Uniform electron transparent plan-view areas of greater than 100 μm2 are extracted from a cross-section to facilitate observation of defect densities as low as ∼106 cm-2. To demonstrate the technique, the active cell layers of two inverted metamorphic III-V solar cell structures have been imaged to reveal defect densities as high as 109 cm2 and as low as 10 6 cm-2.

Original languageEnglish (US)
Title of host publicationProgram - 38th IEEE Photovoltaic Specialists Conference, PVSC 2012
Pages1620-1623
Number of pages4
DOIs
StatePublished - Nov 26 2012
Externally publishedYes
Event38th IEEE Photovoltaic Specialists Conference, PVSC 2012 - Austin, TX, United States
Duration: Jun 3 2012Jun 8 2012

Publication series

NameConference Record of the IEEE Photovoltaic Specialists Conference
ISSN (Print)0160-8371

Other

Other38th IEEE Photovoltaic Specialists Conference, PVSC 2012
CountryUnited States
CityAustin, TX
Period6/3/126/8/12

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Keywords

  • Defect characterization
  • TEM
  • metamorphic devices
  • plan view

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

Cite this

Jackson, M. J., Jackson, B. L., Bodzin, N., Zakaira, A., Liu, X. Q., King, R. R., & Goorsky, M. S. (2012). Large area plan-view transmission electron microscopy sample preparation for multijunction metamorphic solar cell devices. In Program - 38th IEEE Photovoltaic Specialists Conference, PVSC 2012 (pp. 1620-1623). [6317906] (Conference Record of the IEEE Photovoltaic Specialists Conference). https://doi.org/10.1109/PVSC.2012.6317906