In this chapter, kinetic processes associated with thin-film growth will be presented and described. The focus will be on the atomistic and molecular processes involved in adsorption, desorption, decomposition, diffusion, nucleation and growth, and formation and motion of misfit dislocations. Case studies will be provided that annotate when such processes dominate the growth process or determine a particular physical property of the overlayer.

Original languageEnglish (US)
Title of host publicationHandbook of Crystal Growth
Subtitle of host publicationThin Films and Epitaxy: Second Edition
PublisherElsevier Inc.
Number of pages34
ISBN (Electronic)9780444633057
ISBN (Print)9780444633040
StatePublished - Jan 1 2015



  • Adsorption
  • Decomposition
  • Desorption
  • Diffusion
  • Kinetic barrier
  • Kinetics
  • Misfit dislocation
  • Nucleation
  • Thin-film growth

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Newman, N., & Vahidi, M. (2015). Kinetic Processes in Vapor Phase Epitaxy. In Handbook of Crystal Growth: Thin Films and Epitaxy: Second Edition (Vol. 3, pp. 835-868). Elsevier Inc.. https://doi.org/10.1016/B978-0-444-63304-0.00020-2