Kinetic Processes in Vapor Phase Epitaxy

Nathan Newman; Mahmoud Vahidi

doi:10.1016/B978-0-444-63304-0.00020-2

Kinetic Processes in Vapor Phase Epitaxy

Nathan Newman, Mahmoud Vahidi

Research output: Chapter in Book/Report/Conference proceeding › Chapter

2 Scopus citations

Abstract

In this chapter, kinetic processes associated with thin-film growth will be presented and described. The focus will be on the atomistic and molecular processes involved in adsorption, desorption, decomposition, diffusion, nucleation and growth, and formation and motion of misfit dislocations. Case studies will be provided that annotate when such processes dominate the growth process or determine a particular physical property of the overlayer.

Original language	English (US)
Title of host publication	Handbook of Crystal Growth
Subtitle of host publication	Thin Films and Epitaxy: Second Edition
Publisher	Elsevier Inc.
Pages	835-868
Number of pages	34
Volume	3
ISBN (Electronic)	9780444633057
ISBN (Print)	9780444633040
DOIs	https://doi.org/10.1016/B978-0-444-63304-0.00020-2
State	Published - 2015

Keywords

Adsorption
Decomposition
Desorption
Diffusion
Kinetic barrier
Kinetics
Misfit dislocation
Nucleation
Thin-film growth

ASJC Scopus subject areas

Physics and Astronomy(all)

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10.1016/B978-0-444-63304-0.00020-2

Cite this

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title = "Kinetic Processes in Vapor Phase Epitaxy",

abstract = "In this chapter, kinetic processes associated with thin-film growth will be presented and described. The focus will be on the atomistic and molecular processes involved in adsorption, desorption, decomposition, diffusion, nucleation and growth, and formation and motion of misfit dislocations. Case studies will be provided that annotate when such processes dominate the growth process or determine a particular physical property of the overlayer.",

keywords = "Adsorption, Decomposition, Desorption, Diffusion, Kinetic barrier, Kinetics, Misfit dislocation, Nucleation, Thin-film growth",

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T1 - Kinetic Processes in Vapor Phase Epitaxy

AU - Newman, Nathan

AU - Vahidi, Mahmoud

PY - 2015

Y1 - 2015

N2 - In this chapter, kinetic processes associated with thin-film growth will be presented and described. The focus will be on the atomistic and molecular processes involved in adsorption, desorption, decomposition, diffusion, nucleation and growth, and formation and motion of misfit dislocations. Case studies will be provided that annotate when such processes dominate the growth process or determine a particular physical property of the overlayer.

AB - In this chapter, kinetic processes associated with thin-film growth will be presented and described. The focus will be on the atomistic and molecular processes involved in adsorption, desorption, decomposition, diffusion, nucleation and growth, and formation and motion of misfit dislocations. Case studies will be provided that annotate when such processes dominate the growth process or determine a particular physical property of the overlayer.

KW - Adsorption

KW - Decomposition

KW - Desorption

KW - Diffusion

KW - Kinetic barrier

KW - Kinetics

KW - Misfit dislocation

KW - Nucleation

KW - Thin-film growth

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U2 - 10.1016/B978-0-444-63304-0.00020-2

DO - 10.1016/B978-0-444-63304-0.00020-2

M3 - Chapter

AN - SCOPUS:84943531252

SN - 9780444633040

VL - 3

SP - 835

EP - 868

BT - Handbook of Crystal Growth

PB - Elsevier Inc.

ER -

Kinetic Processes in Vapor Phase Epitaxy

Abstract

Keywords

ASJC Scopus subject areas

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