Abstract

In this chapter, kinetic processes associated with thin-film growth will be presented and described. The focus will be on the atomistic and molecular processes involved in adsorption, desorption, decomposition, diffusion, nucleation and growth, and formation and motion of misfit dislocations. Case studies will be provided that annotate when such processes dominate the growth process or determine a particular physical property of the overlayer.

Original languageEnglish (US)
Title of host publicationHandbook of Crystal Growth: Thin Films and Epitaxy: Second Edition
PublisherElsevier Inc.
Pages835-868
Number of pages34
Volume3
ISBN (Print)9780444633057, 9780444633040
DOIs
StatePublished - Dec 17 2014

Fingerprint

vapor phase epitaxy
kinetics
physical properties
desorption
nucleation
decomposition
adsorption
thin films

Keywords

  • Adsorption
  • Decomposition
  • Desorption
  • Diffusion
  • Kinetic barrier
  • Kinetics
  • Misfit dislocation
  • Nucleation
  • Thin-film growth

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Newman, N., & Vahidi, M. (2014). Kinetic Processes in Vapor Phase Epitaxy. In Handbook of Crystal Growth: Thin Films and Epitaxy: Second Edition (Vol. 3, pp. 835-868). Elsevier Inc.. https://doi.org/10.1016/B978-0-444-63304-0.00020-2

Kinetic Processes in Vapor Phase Epitaxy. / Newman, Nathan; Vahidi, Mahmoud.

Handbook of Crystal Growth: Thin Films and Epitaxy: Second Edition. Vol. 3 Elsevier Inc., 2014. p. 835-868.

Research output: Chapter in Book/Report/Conference proceedingChapter

Newman, N & Vahidi, M 2014, Kinetic Processes in Vapor Phase Epitaxy. in Handbook of Crystal Growth: Thin Films and Epitaxy: Second Edition. vol. 3, Elsevier Inc., pp. 835-868. https://doi.org/10.1016/B978-0-444-63304-0.00020-2
Newman N, Vahidi M. Kinetic Processes in Vapor Phase Epitaxy. In Handbook of Crystal Growth: Thin Films and Epitaxy: Second Edition. Vol. 3. Elsevier Inc. 2014. p. 835-868 https://doi.org/10.1016/B978-0-444-63304-0.00020-2
Newman, Nathan ; Vahidi, Mahmoud. / Kinetic Processes in Vapor Phase Epitaxy. Handbook of Crystal Growth: Thin Films and Epitaxy: Second Edition. Vol. 3 Elsevier Inc., 2014. pp. 835-868
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