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Kinetic Monte-Carlo simulations of germanium epitaxial growth on silicon
Richard Akis, David Ferry
Solid State Electronics Research Center (CSSER)
Electrical, Computer, and Energy Engineering, School of (IAFSE-ECEE)
Research output
:
Contribution to journal
›
Article
›
peer-review
1
Scopus citations
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Dive into the research topics of 'Kinetic Monte-Carlo simulations of germanium epitaxial growth on silicon'. Together they form a unique fingerprint.
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Mathematics
Germanium
100%
Kinetic Monte Carlo
99%
Epitaxial Growth
90%
Surface Reconstruction
82%
Silicon
79%
Substrate
65%
Anisotropy
64%
Kinetics
53%
SiGe
52%
Monte Carlo Simulation
49%
Growth Process
36%
Grid
22%
Engineering & Materials Science
Epitaxial growth
79%
Germanium
75%
Surface reconstruction
73%
Anisotropy
58%
Silicon
44%
Substrates
39%
Atoms
29%
Chemical Compounds
Surface Reconstruction
77%
Epitaxial Growth
68%
Monte Carlo Method
59%
Anisotropy
53%
Reaction Yield
11%
Surface
9%
Physics & Astronomy
germanium
50%
kinetics
33%
silicon
30%
anisotropy
23%
simulation
21%
grids
15%
atoms
9%