Issues for construction of 300-mm fab

Allan D. Chasey, Saloni Merchant

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

The cost of constructing and tooling a semiconductor facility, which is currently more than $1 billion, is expected to double by the year 2000, driving semiconductor chip manufacturers to adopt strategies to minimize cost to maximize the return on investment. What seems to be an inevitable transition to the larger, 300-mm wafer will have a widespread impact with massive economic implications. Preliminary tool designs and process approach standards suggest increased automation of material handling and storage systems, increases in utility consumption, tool height and weigh requirements, and schedule compression. Moreover, the contamination sensitivity of the 300-mm wafer might require modification in the fab construction protocol, which in turn could affect labor productivity. Such changes will have a significant impact on construction methods, materials, and management techniques. This paper discusses the key areas in which research is necessary, focusing mainly on issues that have the maximum impact on design and construction of 300-mm fabs. While not providing solutions, this paper is intended to act as a catalyst for further research as 300-mm technology moves closer to becoming a reality.

Original languageEnglish (US)
Pages (from-to)451-457
Number of pages7
JournalJournal of Construction Engineering and Management
Volume126
Issue number6
DOIs
StatePublished - Nov 2000

Fingerprint

Semiconductor materials
Materials handling
Costs
Contamination
Automation
Productivity
Personnel
Economics
Catalysts
Semiconductors
Catalyst
Management techniques
Schedule
Labour productivity
Return on investment
Process approach
Compression

ASJC Scopus subject areas

  • Civil and Structural Engineering
  • Industrial and Manufacturing Engineering
  • Building and Construction

Cite this

Issues for construction of 300-mm fab. / Chasey, Allan D.; Merchant, Saloni.

In: Journal of Construction Engineering and Management, Vol. 126, No. 6, 11.2000, p. 451-457.

Research output: Contribution to journalArticle

Chasey, Allan D. ; Merchant, Saloni. / Issues for construction of 300-mm fab. In: Journal of Construction Engineering and Management. 2000 ; Vol. 126, No. 6. pp. 451-457.
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