Issues affecting quantitative evaluation of dopant profiles using electron holography

Martha McCartney; Jing Li; Partha Chakraborty; L. A. Giannuzzi; S. M. Schwarz

doi:10.1017/s1431927603443882

Issues affecting quantitative evaluation of dopant profiles using electron holography

Martha McCartney, Jing Li, Partha Chakraborty, L. A. Giannuzzi, S. M. Schwarz

Physics

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Original language	English (US)
Pages (from-to)	776-777
Number of pages	2
Journal	Microscopy and Microanalysis
Volume	9
Issue number	SUPPL. 2
DOIs	https://doi.org/10.1017/s1431927603443882
State	Published - 2003

ASJC Scopus subject areas

Instrumentation

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title = "Issues affecting quantitative evaluation of dopant profiles using electron holography",

author = "Martha McCartney and Jing Li and Partha Chakraborty and Giannuzzi, {L. A.} and Schwarz, {S. M.}",

year = "2003",

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language = "English (US)",

volume = "9",

pages = "776--777",

journal = "Microscopy and Microanalysis",

issn = "1431-9276",

publisher = "Cambridge University Press",

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T1 - Issues affecting quantitative evaluation of dopant profiles using electron holography

AU - McCartney, Martha

AU - Li, Jing

AU - Chakraborty, Partha

AU - Giannuzzi, L. A.

AU - Schwarz, S. M.

PY - 2003

Y1 - 2003

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DO - 10.1017/s1431927603443882

M3 - Article

AN - SCOPUS:0041920926

SN - 1431-9276

VL - 9

SP - 776

EP - 777

JO - Microscopy and Microanalysis

JF - Microscopy and Microanalysis

IS - SUPPL. 2

ER -

Issues affecting quantitative evaluation of dopant profiles using electron holography

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