Abstract
The flux and temperature dependence of titanium silicide islands formed by reactive deposition near 500°C indicate a critical nucleus containing 2 Ti atoms and a single activation energy of Ed + 1/2E2 = 1.4±0.2 eV, where Ed and E2 are the surface diffusion and cluster binding energies, respectively. These values are not consistent with STM observations of Ti dimer-vacancy hopping at lower temperatures and show that silicide island nucleation involves a different, highly mobile Ti species.
Original language | English (US) |
---|---|
Journal | Physical Review Letters |
Volume | 87 |
Issue number | 17 |
DOIs | |
State | Published - Oct 9 2001 |
ASJC Scopus subject areas
- General Physics and Astronomy