Island nucleation in a reactive two-component system

T. H. McDaniels, J. A. Venables, Peter Bennett

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

Island nucleation in a reactive two-component system was studied. The flux and temperature dependence of titanium silicide islands formed by reactive deposition near 500°C indicated a critical nucleus containing 2 Ti atoms and a single activation energy. Results showed that silicide island nucleation involved a highly mobile Ti species.

Original languageEnglish (US)
Article number176105
Pages (from-to)1761051-1761054
Number of pages4
JournalPhysical Review Letters
Volume87
Issue number17
StatePublished - Oct 22 2001

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nucleation
titanium
activation energy
temperature dependence
nuclei
atoms

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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McDaniels, T. H., Venables, J. A., & Bennett, P. (2001). Island nucleation in a reactive two-component system. Physical Review Letters, 87(17), 1761051-1761054. [176105].

Island nucleation in a reactive two-component system. / McDaniels, T. H.; Venables, J. A.; Bennett, Peter.

In: Physical Review Letters, Vol. 87, No. 17, 176105, 22.10.2001, p. 1761051-1761054.

Research output: Contribution to journalArticle

McDaniels, TH, Venables, JA & Bennett, P 2001, 'Island nucleation in a reactive two-component system', Physical Review Letters, vol. 87, no. 17, 176105, pp. 1761051-1761054.
McDaniels TH, Venables JA, Bennett P. Island nucleation in a reactive two-component system. Physical Review Letters. 2001 Oct 22;87(17):1761051-1761054. 176105.
McDaniels, T. H. ; Venables, J. A. ; Bennett, Peter. / Island nucleation in a reactive two-component system. In: Physical Review Letters. 2001 ; Vol. 87, No. 17. pp. 1761051-1761054.
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