Island nucleation in a reactive two-component system

T. H. McDaniels, J. A. Venables, Peter Bennett

Research output: Contribution to journalArticle

12 Scopus citations

Abstract

The flux and temperature dependence of titanium silicide islands formed by reactive deposition near 500°C indicate a critical nucleus containing 2 Ti atoms and a single activation energy of Ed + 1/2E2 = 1.4±0.2 eV, where Ed and E2 are the surface diffusion and cluster binding energies, respectively. These values are not consistent with STM observations of Ti dimer-vacancy hopping at lower temperatures and show that silicide island nucleation involves a different, highly mobile Ti species.

Original languageEnglish (US)
JournalPhysical Review Letters
Volume87
Issue number17
DOIs
StatePublished - Oct 9 2001

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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