Ion Implantation to Adhere and to Form Single Crystal Silicon on Polymer for Flexible Display

Terry Alford (Inventor)

Research output: Patent


Introduces the process to improve adhesion between plastic substrates and single crystalline silicon layers by performing gyrogen implantation. Adhesion improvment between plastic and silicon is obtained from the ion-mixing technique which changes the chmical bonding state between two laters. Is is this enhanced adhesion that also provides a stiff interface between the silicon and polymer. This stiff interace is critical; it is needed to facilitate the hot cleaving during subsequent thermal processing or a cold cleave during subsequent mechanical cleaving.
Original languageEnglish (US)
StatePublished - Oct 30 2003


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