Introduces the process to improve adhesion between plastic substrates and single crystalline silicon layers by performing gyrogen implantation. Adhesion improvment between plastic and silicon is obtained from the ion-mixing technique which changes the chmical bonding state between two laters. Is is this enhanced adhesion that also provides a stiff interface between the silicon and polymer. This stiff interace is critical; it is needed to facilitate the hot cleaving during subsequent thermal processing or a cold cleave during subsequent mechanical cleaving.
|Original language||English (US)|
|State||Published - Oct 30 2003|