Ion Implantation to Adhere and to Form Single Crystal Silicon on Polymer for Flexible Display

Terry Alford (Inventor)

Research output: Patent

Abstract

Introduces the process to improve adhesion between plastic substrates and single crystalline silicon layers by performing gyrogen implantation. Adhesion improvment between plastic and silicon is obtained from the ion-mixing technique which changes the chmical bonding state between two laters. Is is this enhanced adhesion that also provides a stiff interface between the silicon and polymer. This stiff interace is critical; it is needed to facilitate the hot cleaving during subsequent thermal processing or a cold cleave during subsequent mechanical cleaving.
Original languageEnglish (US)
StatePublished - Oct 30 2003

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