TY - JOUR
T1 - Ion beam analysis applied to new and innovative technologies
AU - Thompson, D. C.
AU - Kim, H. C.
AU - Alford, Terry
AU - Mayer, J. W.
N1 - Funding Information:
This work was partially supported by a grant from the NSF (DMR-0308127, L. Hess). The authors also acknowledge discussions and assistance from M. Nastasi of Los Alamos National Laboratory, K. Streib and M. Mitan of ASU. J.W. Mayer acknowledges contributions from Rustum Roy.
PY - 2004/6
Y1 - 2004/6
N2 - Ion beam analysis is used to analyze nickel and cobalt silicides formed in a cavity applicator microwave system with a magnetron power of 1200 W and a frequency of 2.45 GHz. Rutherford backscattering spectrometry, X-ray diffraction, four point probe measurements and rump simulation software are used to identify the silicide species present, phases, resistivities and layer thicknesses in samples processed in air, argon and evacuated mediums. Rutherford backscattering spectrometry is also used to confirm that the heating mechanism of the samples in microwaves appears not differ appreciably from that of conventional annealing. Electrical resistivity is used to explain microwave power absorption and demonstrate how to tailor a robust process in which thin film reactions can be attained.
AB - Ion beam analysis is used to analyze nickel and cobalt silicides formed in a cavity applicator microwave system with a magnetron power of 1200 W and a frequency of 2.45 GHz. Rutherford backscattering spectrometry, X-ray diffraction, four point probe measurements and rump simulation software are used to identify the silicide species present, phases, resistivities and layer thicknesses in samples processed in air, argon and evacuated mediums. Rutherford backscattering spectrometry is also used to confirm that the heating mechanism of the samples in microwaves appears not differ appreciably from that of conventional annealing. Electrical resistivity is used to explain microwave power absorption and demonstrate how to tailor a robust process in which thin film reactions can be attained.
KW - Microwaves
KW - Rutherford backscattering spectrometry
KW - Silicides
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U2 - 10.1016/j.nimb.2004.01.198
DO - 10.1016/j.nimb.2004.01.198
M3 - Conference article
AN - SCOPUS:2342598347
SN - 0168-583X
VL - 219-220
SP - 968
EP - 972
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
IS - 1-4
T2 - Proceedings of the Sixteenth International Conference on Ion
Y2 - 29 June 2003 through 4 July 2003
ER -