Investigations of the adhesion of maleic anhydride/cyclic olefin alternating copolymers to silicon substrates: Improved materials for 193 NM lithography
Anthony J. Pasquale, Timothy E. Long, Hoa Truong, Robert D. Allen
Research output: Contribution to journal › Article › peer-review
Dive into the research topics of 'Investigations of the adhesion of maleic anhydride/cyclic olefin alternating copolymers to silicon substrates: Improved materials for 193 NM lithography'. Together they form a unique fingerprint.