Investigations of Rh-based multilayers for soft x-ray applications by high-resolution electron microscopy

Z. G. Li, David Smith, S. C Y Tsen, P. Boher, Ph Houdy

Research output: Contribution to journalArticlepeer-review

7 Scopus citations

Abstract

A series of rhodium-based multilayer structures has been developed for soft x-ray applications by using "trilayer" structures and low density boron carbide spacing material. The microstructure of the multilayers was investigated by high-resolution electron microscopy and compared with those of tungsten- and nickel-based multilayers. Rh crystals having fcc structure but with different preferred orientations were identified in Rh-based layers. It was confirmed that the major limitation on the performance of the multilayer materials was the crystallization of the metal layers. High reflectivity and selectivity for x-ray mirrors was obtained in the case of W/Rh/C multilayers due to significant improvement in their microstructure, especially the interface roughness.

Original languageEnglish (US)
Pages (from-to)2905-2910
Number of pages6
JournalJournal of Applied Physics
Volume70
Issue number6
DOIs
StatePublished - Dec 1 1991

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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