A series of rhodium-based multilayer structures has been developed for soft x-ray applications by using "trilayer" structures and low density boron carbide spacing material. The microstructure of the multilayers was investigated by high-resolution electron microscopy and compared with those of tungsten- and nickel-based multilayers. Rh crystals having fcc structure but with different preferred orientations were identified in Rh-based layers. It was confirmed that the major limitation on the performance of the multilayer materials was the crystallization of the metal layers. High reflectivity and selectivity for x-ray mirrors was obtained in the case of W/Rh/C multilayers due to significant improvement in their microstructure, especially the interface roughness.
ASJC Scopus subject areas
- Physics and Astronomy(all)