Investigation of plasma hydrogenation and trapping mechanism for layer transfer

Peng Chen, Paul K. Chu, T. Höchbauer, J. K. Lee, M. Nastasi, D. Buca, S. Mantl, R. Loo, M. Caymax, Terry Alford, J. W. Mayer, N. David Theodore, M. Cai, B. Schmidt, S. S. Lau

Research output: Contribution to journal › Article › peer-review

28 Scopus citations

Fingerprint

Dive into the research topics of 'Investigation of plasma hydrogenation and trapping mechanism for layer transfer'. Together they form a unique fingerprint.

Physics & Astronomy