Investigation of GaAs surface treatments for ZnSe growth by molecular beam epitaxy without a buffer layer

Chaomin Zhang, Kirstin Alberi, Christiana Honsberg, Kwangwook Park

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

Atomically clean and smooth surfaces are critical prerequisites for the epitaxial regrowth of dissimilar semiconductors. Using ZnSe/GaAs as a model system, epitaxial regrowth without a buffer layer after thermal cleaning with various As-fluxes, atomic Ga flux, and atomic hydrogen treatments to the GaAs substrates and the surfaces were investigated via in-situ Auger electron spectroscopy. The ZnSe epilayers grown on the pre-treated GaAs surfaces without a buffer layer were characterized by X-ray diffraction, photoluminescence and atomic force microscopy to evaluate the effectiveness of the surface treatment methods. It was found that a high quality ZnSe layer can be achieved by atomic hydrogen surface treatment at 300 °C without requiring GaAs buffer layer growth, which reveals a path for epitaxy growth avoiding high temperature treatments.

Original languageEnglish (US)
Article number149245
JournalApplied Surface Science
Volume549
DOIs
StatePublished - May 30 2021

Keywords

  • Epitaxial regrowth
  • II-VI semiconductors
  • III-V semiconductors
  • MBE

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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