Intrinsic limitations on device performance and reliability from bond-constraint induced transition regions at interfaces of stacked dielectrics

G. Lucovsky, H. Yang, H. Niimi, J. W. Keister, J. E. Rowe, M. F. Thorpe, J. C. Phillips

Research output: Contribution to journal › Article › peer-review

26 Scopus citations

Fingerprint

Dive into the research topics of 'Intrinsic limitations on device performance and reliability from bond-constraint induced transition regions at interfaces of stacked dielectrics'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy