Infrared (i.r.) spectroscopy can provide useful chemical information about species present at semiconductor surfaces, at interfaces, and in thin films. Though inherently less sensitive than electron-based techniques, i.r. spectroscopic sensitivity can be greatly enhanced through application of multiple internal reflection geometry. Basic theory describing internal reflection techniques is presented, followed by a discussion of options for apparatus and optics. Finally, examples from the recent literature will be discussed.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Materials Chemistry