Interfacial reactions of copper/refractory alloy and bilayer films on SiO 2

R. L. Spreitzer, S. A. Rafalski, D. Adams, S. W. Russell, Z. Atzmon, J. Li, Terry Alford, J. W. Mayer

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

We studied interfacial phase formation between copper and copper-alloy films on SiO 2 in order to understand how to improve adhesion. CuCr and CuTi alloy and bilayer films on SiO 2 were annealed from 400-600°C for 30 min in an N 2 + H 2 (5%) ambient. The bilayer systems exhibited refractory metal migration from the interface to the surface where they oxidized. In the CuTi bilayer system, an oxidized interfacial Ti layer was observed. Both CuCr and CuTi alloy systems exhibited refractory metal segregation to the interface and surface. Rutherford backscattering spectrometry and Auger electron spectroscopy were used for elemental depth profiling.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium - Proceedings
PublisherMaterials Research Society
Pages631-636
Number of pages6
Volume337
StatePublished - 1994
EventProceedings of the 1994 MRS Spring Meeting - San Francisco, CA, USA
Duration: Apr 4 1994Apr 8 1994

Other

OtherProceedings of the 1994 MRS Spring Meeting
CitySan Francisco, CA, USA
Period4/4/944/8/94

Fingerprint

Refractory alloys
Refractory metals
Copper alloys
Surface chemistry
Depth profiling
Rutherford backscattering spectroscopy
Auger electron spectroscopy
Spectrometry
Copper
Adhesion

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Spreitzer, R. L., Rafalski, S. A., Adams, D., Russell, S. W., Atzmon, Z., Li, J., ... Mayer, J. W. (1994). Interfacial reactions of copper/refractory alloy and bilayer films on SiO 2 In Materials Research Society Symposium - Proceedings (Vol. 337, pp. 631-636). Materials Research Society.

Interfacial reactions of copper/refractory alloy and bilayer films on SiO 2 . / Spreitzer, R. L.; Rafalski, S. A.; Adams, D.; Russell, S. W.; Atzmon, Z.; Li, J.; Alford, Terry; Mayer, J. W.

Materials Research Society Symposium - Proceedings. Vol. 337 Materials Research Society, 1994. p. 631-636.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Spreitzer, RL, Rafalski, SA, Adams, D, Russell, SW, Atzmon, Z, Li, J, Alford, T & Mayer, JW 1994, Interfacial reactions of copper/refractory alloy and bilayer films on SiO 2 in Materials Research Society Symposium - Proceedings. vol. 337, Materials Research Society, pp. 631-636, Proceedings of the 1994 MRS Spring Meeting, San Francisco, CA, USA, 4/4/94.
Spreitzer RL, Rafalski SA, Adams D, Russell SW, Atzmon Z, Li J et al. Interfacial reactions of copper/refractory alloy and bilayer films on SiO 2 In Materials Research Society Symposium - Proceedings. Vol. 337. Materials Research Society. 1994. p. 631-636
Spreitzer, R. L. ; Rafalski, S. A. ; Adams, D. ; Russell, S. W. ; Atzmon, Z. ; Li, J. ; Alford, Terry ; Mayer, J. W. / Interfacial reactions of copper/refractory alloy and bilayer films on SiO 2 Materials Research Society Symposium - Proceedings. Vol. 337 Materials Research Society, 1994. pp. 631-636
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