Interface Reactions of Titanium on Single Crystal and Thin Film Diamond Analyzed by UV Photoemission Spectroscopy

J. VanderWeide, Robert Nemanich

Research output: Contribution to journalArticle

3 Scopus citations

Abstract

The reactions of titanium on natural crystals and CVD polycrystalline thin films were studied by uv-photoemission spectroscopy. The focus of this study was to characterize the interface reactions and to determine the Schottky barrier of titanium on diamond, deposited and annealed in UHV. Spectroscopic features attributed to the electronic states of Ti-C were identified, and the formation of titanium carbide was observed as a function of annealing temperature. The onset of a titanium-carbon reaction was observed after the 400°C anneal. A well defined TiC spectra was observed after annealing to 600°C. The Schottky barrier height from Ti on natural p-type diamond (111) was obtained by determining the valence band maximum and the Fermi level, and a barrier height of 1.0±0.2 eV was found.

Original languageEnglish (US)
Pages (from-to)359-364
Number of pages6
JournalMaterials Science Monographs
Volume73
Issue numberC
DOIs
StatePublished - Jan 1 1991
Externally publishedYes

ASJC Scopus subject areas

  • Metals and Alloys

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