Engineering & Materials Science
Spectroscopic ellipsometry
100%
Photoelectron spectroscopy
93%
Heterojunctions
71%
High resolution transmission electron microscopy
60%
Annealing
54%
X rays
49%
Semiconductor materials
32%
Rapid thermal annealing
28%
Degradation
25%
Metals
23%
Silicon nitride
22%
Temperature
22%
Electric properties
19%
Crystalline materials
19%
Transmission electron microscopy
18%
Chemical reactions
18%
Capacitance
15%
Capacitors
14%
Microstructure
12%
Electric potential
9%
Physics & Astronomy
annealing
33%
characterization
30%
x ray spectroscopy
21%
ellipsometry
20%
photoelectron spectroscopy
16%
MIS (semiconductors)
15%
transmission electron microscopy
13%
high resolution
8%
silicon nitrides
6%
interlayers
6%
chemical reactions
6%
capacitors
5%
capacitance
5%
traps
5%
insulators
5%
electrical properties
5%
microstructure
4%
electric potential
3%