Integration of a film bulk acoustic resonator with microfluidic channels for biomedical sensing in liquid

W. Xu, X. Zhang, H. Yu, A. Abbaspour-Tamijani, Junseok Chae

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

This paper reports an integration of microfluidic channels with a film bulk acoustic resonator (FBAR) for in liquid biomedical sensing applications. The device consists of a zinc oxide (ZnO) film based longitudinal mode FBAR and parylene encapsulated microfluidic channels. By confining the liquid with the height comparable to the acoustic wavelength of the FBAR in the microfluidic channels, the quality factor (Q) of the resonating system significantly increases, resulting in very high sensitivity FBAR sensor for liquid samples. We demonstrate a FBAR with Q up to 120, an improvement of more than 8 times over that of existing FBARs in liquid. A bio-molecular (streptavidine) sensing test presents a sensitivity of 638 Hz cm2/ng and an extremely fine resolution of 2.025 ng/cm2 of the sensor.

Original languageEnglish (US)
Title of host publication2008 Solid-State Sensors, Actuators, and Microsystems Workshop
EditorsKimberly L. Turner, Leland Spangler
PublisherTransducer Research Foundation
Pages36-39
Number of pages4
ISBN (Electronic)0964002477, 9780964002470
DOIs
StatePublished - 2008
Event2008 Solid-State Sensors, Actuators, and Microsystems Workshop - Hilton Head Island, United States
Duration: Jun 1 2008Jun 5 2008

Publication series

NameTechnical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Conference

Conference2008 Solid-State Sensors, Actuators, and Microsystems Workshop
CountryUnited States
CityHilton Head Island
Period6/1/086/5/08

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Hardware and Architecture

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  • Cite this

    Xu, W., Zhang, X., Yu, H., Abbaspour-Tamijani, A., & Chae, J. (2008). Integration of a film bulk acoustic resonator with microfluidic channels for biomedical sensing in liquid. In K. L. Turner, & L. Spangler (Eds.), 2008 Solid-State Sensors, Actuators, and Microsystems Workshop (pp. 36-39). (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop). Transducer Research Foundation. https://doi.org/10.31438/trf.hh2008.10