TY - GEN
T1 - Integration of a film bulk acoustic resonator with microfluidic channels for biomedical sensing in liquid
AU - Xu, W.
AU - Zhang, X.
AU - Yu, H.
AU - Abbaspour-Tamijani, A.
AU - Chae, Junseok
N1 - Publisher Copyright:
© 2008 TRF.
Copyright:
Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2008
Y1 - 2008
N2 - This paper reports an integration of microfluidic channels with a film bulk acoustic resonator (FBAR) for in liquid biomedical sensing applications. The device consists of a zinc oxide (ZnO) film based longitudinal mode FBAR and parylene encapsulated microfluidic channels. By confining the liquid with the height comparable to the acoustic wavelength of the FBAR in the microfluidic channels, the quality factor (Q) of the resonating system significantly increases, resulting in very high sensitivity FBAR sensor for liquid samples. We demonstrate a FBAR with Q up to 120, an improvement of more than 8 times over that of existing FBARs in liquid. A bio-molecular (streptavidine) sensing test presents a sensitivity of 638 Hz cm2/ng and an extremely fine resolution of 2.025 ng/cm2 of the sensor.
AB - This paper reports an integration of microfluidic channels with a film bulk acoustic resonator (FBAR) for in liquid biomedical sensing applications. The device consists of a zinc oxide (ZnO) film based longitudinal mode FBAR and parylene encapsulated microfluidic channels. By confining the liquid with the height comparable to the acoustic wavelength of the FBAR in the microfluidic channels, the quality factor (Q) of the resonating system significantly increases, resulting in very high sensitivity FBAR sensor for liquid samples. We demonstrate a FBAR with Q up to 120, an improvement of more than 8 times over that of existing FBARs in liquid. A bio-molecular (streptavidine) sensing test presents a sensitivity of 638 Hz cm2/ng and an extremely fine resolution of 2.025 ng/cm2 of the sensor.
UR - http://www.scopus.com/inward/record.url?scp=77949415995&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=77949415995&partnerID=8YFLogxK
U2 - 10.31438/trf.hh2008.10
DO - 10.31438/trf.hh2008.10
M3 - Conference contribution
AN - SCOPUS:77949415995
T3 - Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop
SP - 36
EP - 39
BT - 2008 Solid-State Sensors, Actuators, and Microsystems Workshop
A2 - Turner, Kimberly L.
A2 - Spangler, Leland
PB - Transducer Research Foundation
T2 - 2008 Solid-State Sensors, Actuators, and Microsystems Workshop
Y2 - 1 June 2008 through 5 June 2008
ER -