Integration of a film bulk acoustic resonator with microfluidic channels for biomedical sensing in liquid

W. Xu, X. Zhang, H. Yu, A. Abbaspour-Tamijani, Junseok Chae

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper reports an integration of microfluidic channels with a film bulk acoustic resonator (FBAR) for in liquid biomedical sensing applications. The device consists of a zinc oxide (ZnO) film based longitudinal mode FBAR and parylene encapsulated microfluidic channels. By confining the liquid with the height comparable to the acoustic wavelength of the FBAR in the microfluidic channels, the quality factor (Q) of the resonating system significantly increases, resulting in very high sensitivity FBAR sensor for liquid samples. We demonstrate a FBAR with Q up to 120, an improvement of more than 8 times over that of existing FBARs in liquid. A bio-molecular (streptavidine) sensing test presents a sensitivity of 638 Hz cm 2 /ng and an extremely fine resolution of 2.025 ng/cm 2 of the sensor.

Original languageEnglish (US)
Title of host publication2008 Solid-State Sensors, Actuators, and Microsystems Workshop
EditorsLeland Spangler, Kimberly L. Turner
PublisherTransducer Research Foundation
Pages36-39
Number of pages4
ISBN (Electronic)9780964002494
StatePublished - Jan 1 2008
Event2008 Solid-State Sensors, Actuators, and Microsystems Workshop - Hilton Head Island, United States
Duration: Jun 1 2008Jun 5 2008

Publication series

NameTechnical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Conference

Conference2008 Solid-State Sensors, Actuators, and Microsystems Workshop
CountryUnited States
CityHilton Head Island
Period6/1/086/5/08

Fingerprint

Acoustic resonators
Microfluidics
Liquids
Sensors
Zinc oxide
Oxide films
Acoustics
Wavelength

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Hardware and Architecture

Cite this

Xu, W., Zhang, X., Yu, H., Abbaspour-Tamijani, A., & Chae, J. (2008). Integration of a film bulk acoustic resonator with microfluidic channels for biomedical sensing in liquid. In L. Spangler, & K. L. Turner (Eds.), 2008 Solid-State Sensors, Actuators, and Microsystems Workshop (pp. 36-39). (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop). Transducer Research Foundation.

Integration of a film bulk acoustic resonator with microfluidic channels for biomedical sensing in liquid. / Xu, W.; Zhang, X.; Yu, H.; Abbaspour-Tamijani, A.; Chae, Junseok.

2008 Solid-State Sensors, Actuators, and Microsystems Workshop. ed. / Leland Spangler; Kimberly L. Turner. Transducer Research Foundation, 2008. p. 36-39 (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Xu, W, Zhang, X, Yu, H, Abbaspour-Tamijani, A & Chae, J 2008, Integration of a film bulk acoustic resonator with microfluidic channels for biomedical sensing in liquid. in L Spangler & KL Turner (eds), 2008 Solid-State Sensors, Actuators, and Microsystems Workshop. Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop, Transducer Research Foundation, pp. 36-39, 2008 Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head Island, United States, 6/1/08.
Xu W, Zhang X, Yu H, Abbaspour-Tamijani A, Chae J. Integration of a film bulk acoustic resonator with microfluidic channels for biomedical sensing in liquid. In Spangler L, Turner KL, editors, 2008 Solid-State Sensors, Actuators, and Microsystems Workshop. Transducer Research Foundation. 2008. p. 36-39. (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop).
Xu, W. ; Zhang, X. ; Yu, H. ; Abbaspour-Tamijani, A. ; Chae, Junseok. / Integration of a film bulk acoustic resonator with microfluidic channels for biomedical sensing in liquid. 2008 Solid-State Sensors, Actuators, and Microsystems Workshop. editor / Leland Spangler ; Kimberly L. Turner. Transducer Research Foundation, 2008. pp. 36-39 (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop).
@inproceedings{a83d7995cb2d43c694f5c869188ec56d,
title = "Integration of a film bulk acoustic resonator with microfluidic channels for biomedical sensing in liquid",
abstract = "This paper reports an integration of microfluidic channels with a film bulk acoustic resonator (FBAR) for in liquid biomedical sensing applications. The device consists of a zinc oxide (ZnO) film based longitudinal mode FBAR and parylene encapsulated microfluidic channels. By confining the liquid with the height comparable to the acoustic wavelength of the FBAR in the microfluidic channels, the quality factor (Q) of the resonating system significantly increases, resulting in very high sensitivity FBAR sensor for liquid samples. We demonstrate a FBAR with Q up to 120, an improvement of more than 8 times over that of existing FBARs in liquid. A bio-molecular (streptavidine) sensing test presents a sensitivity of 638 Hz cm 2 /ng and an extremely fine resolution of 2.025 ng/cm 2 of the sensor.",
author = "W. Xu and X. Zhang and H. Yu and A. Abbaspour-Tamijani and Junseok Chae",
year = "2008",
month = "1",
day = "1",
language = "English (US)",
series = "Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop",
publisher = "Transducer Research Foundation",
pages = "36--39",
editor = "Leland Spangler and Turner, {Kimberly L.}",
booktitle = "2008 Solid-State Sensors, Actuators, and Microsystems Workshop",

}

TY - GEN

T1 - Integration of a film bulk acoustic resonator with microfluidic channels for biomedical sensing in liquid

AU - Xu, W.

AU - Zhang, X.

AU - Yu, H.

AU - Abbaspour-Tamijani, A.

AU - Chae, Junseok

PY - 2008/1/1

Y1 - 2008/1/1

N2 - This paper reports an integration of microfluidic channels with a film bulk acoustic resonator (FBAR) for in liquid biomedical sensing applications. The device consists of a zinc oxide (ZnO) film based longitudinal mode FBAR and parylene encapsulated microfluidic channels. By confining the liquid with the height comparable to the acoustic wavelength of the FBAR in the microfluidic channels, the quality factor (Q) of the resonating system significantly increases, resulting in very high sensitivity FBAR sensor for liquid samples. We demonstrate a FBAR with Q up to 120, an improvement of more than 8 times over that of existing FBARs in liquid. A bio-molecular (streptavidine) sensing test presents a sensitivity of 638 Hz cm 2 /ng and an extremely fine resolution of 2.025 ng/cm 2 of the sensor.

AB - This paper reports an integration of microfluidic channels with a film bulk acoustic resonator (FBAR) for in liquid biomedical sensing applications. The device consists of a zinc oxide (ZnO) film based longitudinal mode FBAR and parylene encapsulated microfluidic channels. By confining the liquid with the height comparable to the acoustic wavelength of the FBAR in the microfluidic channels, the quality factor (Q) of the resonating system significantly increases, resulting in very high sensitivity FBAR sensor for liquid samples. We demonstrate a FBAR with Q up to 120, an improvement of more than 8 times over that of existing FBARs in liquid. A bio-molecular (streptavidine) sensing test presents a sensitivity of 638 Hz cm 2 /ng and an extremely fine resolution of 2.025 ng/cm 2 of the sensor.

UR - http://www.scopus.com/inward/record.url?scp=77949415995&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77949415995&partnerID=8YFLogxK

M3 - Conference contribution

T3 - Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

SP - 36

EP - 39

BT - 2008 Solid-State Sensors, Actuators, and Microsystems Workshop

A2 - Spangler, Leland

A2 - Turner, Kimberly L.

PB - Transducer Research Foundation

ER -