Integrating CAM and Process Simulation to Enhance On-Line Analysis and Control of IC Fabrication

Angus J. Macdonald, Anthony J. Walton, J. M. Robertson, Robert J. Holwill

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

How a process simulator has been integrated with a commercial computer-aided manufacturing (CAM) system to provide a set of powerful tools for process analysis, diagnosis, and control, is described. The CAM system acts as the interface to the simulator and maintains the simulation control data as part of the process specification. Making process simulation available in a manufacturing environment allows engineers to intuitively investigate the process thus aiding their understanding of the interrelation of process steps; it is believed that this is the first time such a system has been implemented. A misprocessing scenario in an ASIC facility is used to demonstrate how the system can be used to analyse options for corrective processing. Other applications exist in its use for documenting processes, to simplify process transfer and implementation, and investigating the effect of corrective processing on device reliability.

Original languageEnglish (US)
Pages (from-to)72-79
Number of pages8
JournalIEEE Transactions on Semiconductor Manufacturing
Volume3
Issue number2
DOIs
StatePublished - 1990
Externally publishedYes

Fingerprint

computer aided manufacturing
Computer aided manufacturing
simulators
Fabrication
fabrication
application specific integrated circuits
Simulators
engineers
specifications
manufacturing
simulation
Application specific integrated circuits
Processing
Interfaces (computer)
Specifications
Engineers

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Industrial and Manufacturing Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Integrating CAM and Process Simulation to Enhance On-Line Analysis and Control of IC Fabrication. / Macdonald, Angus J.; Walton, Anthony J.; Robertson, J. M.; Holwill, Robert J.

In: IEEE Transactions on Semiconductor Manufacturing, Vol. 3, No. 2, 1990, p. 72-79.

Research output: Contribution to journalArticle

Macdonald, Angus J. ; Walton, Anthony J. ; Robertson, J. M. ; Holwill, Robert J. / Integrating CAM and Process Simulation to Enhance On-Line Analysis and Control of IC Fabrication. In: IEEE Transactions on Semiconductor Manufacturing. 1990 ; Vol. 3, No. 2. pp. 72-79.
@article{575893c53c014b4baa9aee46f51b16ef,
title = "Integrating CAM and Process Simulation to Enhance On-Line Analysis and Control of IC Fabrication",
abstract = "How a process simulator has been integrated with a commercial computer-aided manufacturing (CAM) system to provide a set of powerful tools for process analysis, diagnosis, and control, is described. The CAM system acts as the interface to the simulator and maintains the simulation control data as part of the process specification. Making process simulation available in a manufacturing environment allows engineers to intuitively investigate the process thus aiding their understanding of the interrelation of process steps; it is believed that this is the first time such a system has been implemented. A misprocessing scenario in an ASIC facility is used to demonstrate how the system can be used to analyse options for corrective processing. Other applications exist in its use for documenting processes, to simplify process transfer and implementation, and investigating the effect of corrective processing on device reliability.",
author = "Macdonald, {Angus J.} and Walton, {Anthony J.} and Robertson, {J. M.} and Holwill, {Robert J.}",
year = "1990",
doi = "10.1109/66.53189",
language = "English (US)",
volume = "3",
pages = "72--79",
journal = "IEEE Transactions on Semiconductor Manufacturing",
issn = "0894-6507",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "2",

}

TY - JOUR

T1 - Integrating CAM and Process Simulation to Enhance On-Line Analysis and Control of IC Fabrication

AU - Macdonald, Angus J.

AU - Walton, Anthony J.

AU - Robertson, J. M.

AU - Holwill, Robert J.

PY - 1990

Y1 - 1990

N2 - How a process simulator has been integrated with a commercial computer-aided manufacturing (CAM) system to provide a set of powerful tools for process analysis, diagnosis, and control, is described. The CAM system acts as the interface to the simulator and maintains the simulation control data as part of the process specification. Making process simulation available in a manufacturing environment allows engineers to intuitively investigate the process thus aiding their understanding of the interrelation of process steps; it is believed that this is the first time such a system has been implemented. A misprocessing scenario in an ASIC facility is used to demonstrate how the system can be used to analyse options for corrective processing. Other applications exist in its use for documenting processes, to simplify process transfer and implementation, and investigating the effect of corrective processing on device reliability.

AB - How a process simulator has been integrated with a commercial computer-aided manufacturing (CAM) system to provide a set of powerful tools for process analysis, diagnosis, and control, is described. The CAM system acts as the interface to the simulator and maintains the simulation control data as part of the process specification. Making process simulation available in a manufacturing environment allows engineers to intuitively investigate the process thus aiding their understanding of the interrelation of process steps; it is believed that this is the first time such a system has been implemented. A misprocessing scenario in an ASIC facility is used to demonstrate how the system can be used to analyse options for corrective processing. Other applications exist in its use for documenting processes, to simplify process transfer and implementation, and investigating the effect of corrective processing on device reliability.

UR - http://www.scopus.com/inward/record.url?scp=0025430378&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0025430378&partnerID=8YFLogxK

U2 - 10.1109/66.53189

DO - 10.1109/66.53189

M3 - Article

AN - SCOPUS:0025430378

VL - 3

SP - 72

EP - 79

JO - IEEE Transactions on Semiconductor Manufacturing

JF - IEEE Transactions on Semiconductor Manufacturing

SN - 0894-6507

IS - 2

ER -