Integrating CAM and Process Simulation to Enhance On-Line Analysis and Control of IC Fabrication

Angus J. Macdonald, Anthony J. Walton, J. M. Robertson, Robert J. Holwill

Research output: Contribution to journalArticle

2 Scopus citations

Abstract

How a process simulator has been integrated with a commercial computer-aided manufacturing (CAM) system to provide a set of powerful tools for process analysis, diagnosis, and control, is described. The CAM system acts as the interface to the simulator and maintains the simulation control data as part of the process specification. Making process simulation available in a manufacturing environment allows engineers to intuitively investigate the process thus aiding their understanding of the interrelation of process steps; it is believed that this is the first time such a system has been implemented. A misprocessing scenario in an ASIC facility is used to demonstrate how the system can be used to analyse options for corrective processing. Other applications exist in its use for documenting processes, to simplify process transfer and implementation, and investigating the effect of corrective processing on device reliability.

Original languageEnglish (US)
Pages (from-to)72-79
Number of pages8
JournalIEEE Transactions on Semiconductor Manufacturing
Volume3
Issue number2
DOIs
StatePublished - May 1990

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

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