Integrated Scheduling of Jobs, Reticles, Machines, AMHS and ARHS in a Semiconductor Manufacturing

Andy Ham, Myoung Ju Park, Ho Jun Shin, Si Young Choi, John W. Fowler

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper studies simultaneous scheduling of production and material transfer in the semiconductor photolithography area. In particular, jobs are transferred by a material handling system that employees a fleet of vehicles. Reticles serving as an auxiliary resource are also transferred from one place to another by a different set of vehicles. The extremely complex scheduling problem that includes jobs, reticles, machines, and two different sets of vehicles is (apparently) studied for the first time. A novel constraint programming model is proposed.

Original languageEnglish (US)
Title of host publicationProceedings of the 2020 Winter Simulation Conference, WSC 2020
EditorsK.-H. Bae, B. Feng, S. Kim, S. Lazarova-Molnar, Z. Zheng, T. Roeder, R. Thiesing
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1966-1973
Number of pages8
ISBN (Electronic)9781728194998
DOIs
StatePublished - Dec 14 2020
Event2020 Winter Simulation Conference, WSC 2020 - Orlando, United States
Duration: Dec 14 2020Dec 18 2020

Publication series

NameProceedings - Winter Simulation Conference
Volume2020-December
ISSN (Print)0891-7736

Conference

Conference2020 Winter Simulation Conference, WSC 2020
CountryUnited States
CityOrlando
Period12/14/2012/18/20

ASJC Scopus subject areas

  • Software
  • Modeling and Simulation
  • Computer Science Applications

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