Integrated identification and control for diffusion/CVD furnaces

Konstantinos Tsakalis, Kevin Stoddard

Research output: Chapter in Book/Report/Conference proceedingConference contribution

11 Scopus citations

Abstract

The paper describes an integrated approach for modeling and robust multivariable controller design, with application to temperature control of diffusion and CVD furnaces. The modeling relies on input-output data, collected in a preliminary identification experiment at the desired operating conditions. An important component of the identification is the computation of uncertainty bounds that describe the confidence limits of the model, in a manner consistent with robust control theory. The results of the identification are then used to design an H-infinity controller with a cascade, hierarchical structure. The final implementation of the controller also includes mechanisms to prevent integrator wind-up. Special emphasis is placed on automating the procedure -for classes of furnaces- so that, potentially, it can be used by non-experts in the field. Implementations include several industrial furnaces. Experimental results demonstrate the success of the approach as well as a good agreement between predicted and actual closed-loop behavior.

Original languageEnglish (US)
Title of host publicationIEEE Symposium on Emerging Technologies & Factory Automation, ETFA
Place of PublicationPiscataway, NJ, United States
PublisherIEEE
Pages514-519
Number of pages6
StatePublished - 1997
EventProceedings of the 1997 IEEE 6th International Conference on Emerging Technologies and Factory Automation, ETFA'97 - Los Angeles, CA, USA
Duration: Sep 9 1997Sep 12 1997

Other

OtherProceedings of the 1997 IEEE 6th International Conference on Emerging Technologies and Factory Automation, ETFA'97
CityLos Angeles, CA, USA
Period9/9/979/12/97

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Tsakalis, K., & Stoddard, K. (1997). Integrated identification and control for diffusion/CVD furnaces. In IEEE Symposium on Emerging Technologies & Factory Automation, ETFA (pp. 514-519). IEEE.