Abstract
We demonstrate the microfabrication of a low-noise silicon based device with integrated silver/silver chloride electrodes used for the measurement of single ion channel proteins. An aperture of 150 μm diameter was etched in a silicon substrate using a deep silicon reactive ion etcher and passivated with 30 nm of polytetrafluoroethylene via chemical vapor deposition. The average recorded noise in measurements of lipid bilayers was reduced by a factor of four through patterning of a 75 μm thick SU-8 layer around the aperture. Integrated electrodes were fabricated on both sides of the device and used for repeatable, stable, giga-seal bilayer formations as well as characteristic measurements of the transmembrane protein OmpF porin.
Original language | English (US) |
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Pages (from-to) | 183-190 |
Number of pages | 8 |
Journal | Biosensors and Bioelectronics |
Volume | 23 |
Issue number | 2 |
DOIs | |
State | Published - Sep 30 2007 |
Keywords
- Ion channels
- Lipid bilayers
- Microfabrication
ASJC Scopus subject areas
- Biotechnology
- Biophysics
- Biomedical Engineering
- Electrochemistry