Infrared spectroscopy of Si(111) surfaces after HF treatment: Hydrogen termination and surface morphology

Veronica Burrows; Y. J. Chabal; G. S. Higashi; K. Raghavachari; S. B. Christman

doi:10.1063/1.100053

Infrared spectroscopy of Si(111) surfaces after HF treatment: Hydrogen termination and surface morphology

Veronica Burrows, Y. J. Chabal, G. S. Higashi, K. Raghavachari, S. B. Christman

Chemical Engineering

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Abstract

Polarized internal reflection spectroscopy has been used to characterize HF-treated Si(111) surfaces. The silicon-hydrogen stretching vibrations indicate that the surface is well ordered, but is microscopically rough, with coupled monohydride, dihydride, and trihydride termination.

Original language	English (US)
Pages (from-to)	998-1000
Number of pages	3
Journal	Applied Physics Letters
Volume	53
Issue number	11
DOIs	https://doi.org/10.1063/1.100053
State	Published - 1988

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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@article{64efda71b64843849064cde3f218b433,

title = "Infrared spectroscopy of Si(111) surfaces after HF treatment: Hydrogen termination and surface morphology",

abstract = "Polarized internal reflection spectroscopy has been used to characterize HF-treated Si(111) surfaces. The silicon-hydrogen stretching vibrations indicate that the surface is well ordered, but is microscopically rough, with coupled monohydride, dihydride, and trihydride termination.",

author = "Veronica Burrows and Chabal, {Y. J.} and Higashi, {G. S.} and K. Raghavachari and Christman, {S. B.}",

year = "1988",

doi = "10.1063/1.100053",

language = "English (US)",

volume = "53",

pages = "998--1000",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "11",

}

TY - JOUR

T1 - Infrared spectroscopy of Si(111) surfaces after HF treatment

T2 - Hydrogen termination and surface morphology

AU - Burrows, Veronica

AU - Chabal, Y. J.

AU - Higashi, G. S.

AU - Raghavachari, K.

AU - Christman, S. B.

PY - 1988

Y1 - 1988

N2 - Polarized internal reflection spectroscopy has been used to characterize HF-treated Si(111) surfaces. The silicon-hydrogen stretching vibrations indicate that the surface is well ordered, but is microscopically rough, with coupled monohydride, dihydride, and trihydride termination.

AB - Polarized internal reflection spectroscopy has been used to characterize HF-treated Si(111) surfaces. The silicon-hydrogen stretching vibrations indicate that the surface is well ordered, but is microscopically rough, with coupled monohydride, dihydride, and trihydride termination.

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U2 - 10.1063/1.100053

DO - 10.1063/1.100053

M3 - Article

AN - SCOPUS:36549099751

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VL - 53

SP - 998

EP - 1000

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 11

ER -

Infrared spectroscopy of Si(111) surfaces after HF treatment: Hydrogen termination and surface morphology

Abstract

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