Infrared spectroscopy of Si(111) surfaces after HF treatment

Hydrogen termination and surface morphology

Veronica Burrows, Y. J. Chabal, G. S. Higashi, K. Raghavachari, S. B. Christman

Research output: Contribution to journalArticle

433 Citations (Scopus)

Abstract

Polarized internal reflection spectroscopy has been used to characterize HF-treated Si(111) surfaces. The silicon-hydrogen stretching vibrations indicate that the surface is well ordered, but is microscopically rough, with coupled monohydride, dihydride, and trihydride termination.

Original languageEnglish (US)
Pages (from-to)998-1000
Number of pages3
JournalApplied Physics Letters
Volume53
Issue number11
DOIs
StatePublished - 1988

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infrared spectroscopy
dihydrides
hydrogen
vibration
silicon
spectroscopy

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Burrows, V., Chabal, Y. J., Higashi, G. S., Raghavachari, K., & Christman, S. B. (1988). Infrared spectroscopy of Si(111) surfaces after HF treatment: Hydrogen termination and surface morphology. Applied Physics Letters, 53(11), 998-1000. https://doi.org/10.1063/1.100053

Infrared spectroscopy of Si(111) surfaces after HF treatment : Hydrogen termination and surface morphology. / Burrows, Veronica; Chabal, Y. J.; Higashi, G. S.; Raghavachari, K.; Christman, S. B.

In: Applied Physics Letters, Vol. 53, No. 11, 1988, p. 998-1000.

Research output: Contribution to journalArticle

Burrows, V, Chabal, YJ, Higashi, GS, Raghavachari, K & Christman, SB 1988, 'Infrared spectroscopy of Si(111) surfaces after HF treatment: Hydrogen termination and surface morphology', Applied Physics Letters, vol. 53, no. 11, pp. 998-1000. https://doi.org/10.1063/1.100053
Burrows, Veronica ; Chabal, Y. J. ; Higashi, G. S. ; Raghavachari, K. ; Christman, S. B. / Infrared spectroscopy of Si(111) surfaces after HF treatment : Hydrogen termination and surface morphology. In: Applied Physics Letters. 1988 ; Vol. 53, No. 11. pp. 998-1000.
@article{64efda71b64843849064cde3f218b433,
title = "Infrared spectroscopy of Si(111) surfaces after HF treatment: Hydrogen termination and surface morphology",
abstract = "Polarized internal reflection spectroscopy has been used to characterize HF-treated Si(111) surfaces. The silicon-hydrogen stretching vibrations indicate that the surface is well ordered, but is microscopically rough, with coupled monohydride, dihydride, and trihydride termination.",
author = "Veronica Burrows and Chabal, {Y. J.} and Higashi, {G. S.} and K. Raghavachari and Christman, {S. B.}",
year = "1988",
doi = "10.1063/1.100053",
language = "English (US)",
volume = "53",
pages = "998--1000",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics Publising LLC",
number = "11",

}

TY - JOUR

T1 - Infrared spectroscopy of Si(111) surfaces after HF treatment

T2 - Hydrogen termination and surface morphology

AU - Burrows, Veronica

AU - Chabal, Y. J.

AU - Higashi, G. S.

AU - Raghavachari, K.

AU - Christman, S. B.

PY - 1988

Y1 - 1988

N2 - Polarized internal reflection spectroscopy has been used to characterize HF-treated Si(111) surfaces. The silicon-hydrogen stretching vibrations indicate that the surface is well ordered, but is microscopically rough, with coupled monohydride, dihydride, and trihydride termination.

AB - Polarized internal reflection spectroscopy has been used to characterize HF-treated Si(111) surfaces. The silicon-hydrogen stretching vibrations indicate that the surface is well ordered, but is microscopically rough, with coupled monohydride, dihydride, and trihydride termination.

UR - http://www.scopus.com/inward/record.url?scp=36549099751&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=36549099751&partnerID=8YFLogxK

U2 - 10.1063/1.100053

DO - 10.1063/1.100053

M3 - Article

VL - 53

SP - 998

EP - 1000

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 11

ER -