Infrared spectroscopy of Si(111) surfaces after HF treatment: Hydrogen termination and surface morphology

Veronica Burrows, Y. J. Chabal, G. S. Higashi, K. Raghavachari, S. B. Christman

Research output: Contribution to journalArticle

440 Scopus citations

Abstract

Polarized internal reflection spectroscopy has been used to characterize HF-treated Si(111) surfaces. The silicon-hydrogen stretching vibrations indicate that the surface is well ordered, but is microscopically rough, with coupled monohydride, dihydride, and trihydride termination.

Original languageEnglish (US)
Pages (from-to)998-1000
Number of pages3
JournalApplied Physics Letters
Volume53
Issue number11
DOIs
StatePublished - Dec 1 1988

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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    Burrows, V., Chabal, Y. J., Higashi, G. S., Raghavachari, K., & Christman, S. B. (1988). Infrared spectroscopy of Si(111) surfaces after HF treatment: Hydrogen termination and surface morphology. Applied Physics Letters, 53(11), 998-1000. https://doi.org/10.1063/1.100053