Infrared detection using film bulk acoustic resonators

Ziyu Wang; Xiaotun Qiu; Jing Shi; Hongyu Yu

doi:10.2174/1876402911103020099

Infrared detection using film bulk acoustic resonators

Ziyu Wang, Xiaotun Qiu, Jing Shi, Hongyu Yu

Research output: Contribution to journal › Article › peer-review

Abstract

This paper described an infrared (IR) radiation sensor based on Film Bulk Acoustic Resonator (FBAR). The resonant frequency of the FBAR decreased linearly when there was IR (peak wavelength at 780 nm) illumination on the device. The sensing mechanism was attributed to the temperature-dependent Young's modulus of the resonator material (ZnO), which subsequently shifted the resonant frequency. The noise equivalent temperature difference (NETD) and the detection limit for 780 nm IR were 16 mK at 25 °C and 2.9 μW/mm², respectively. This study has proven the feasibility of detecting IR using ZnO film based FBAR.

Original language	English (US)
Pages (from-to)	99-103
Number of pages	5
Journal	Micro and Nanosystems
Volume	3
Issue number	2
DOIs	https://doi.org/10.2174/1876402911103020099
State	Published - Jul 2011

Keywords

Film bulk acoustic resonator
Infrared radiation

ASJC Scopus subject areas

Building and Construction

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title = "Infrared detection using film bulk acoustic resonators",

abstract = "This paper described an infrared (IR) radiation sensor based on Film Bulk Acoustic Resonator (FBAR). The resonant frequency of the FBAR decreased linearly when there was IR (peak wavelength at 780 nm) illumination on the device. The sensing mechanism was attributed to the temperature-dependent Young's modulus of the resonator material (ZnO), which subsequently shifted the resonant frequency. The noise equivalent temperature difference (NETD) and the detection limit for 780 nm IR were 16 mK at 25 °C and 2.9 μW/mm2, respectively. This study has proven the feasibility of detecting IR using ZnO film based FBAR.",

keywords = "Film bulk acoustic resonator, Infrared radiation",

author = "Ziyu Wang and Xiaotun Qiu and Jing Shi and Hongyu Yu",

year = "2011",

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doi = "10.2174/1876402911103020099",

language = "English (US)",

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T1 - Infrared detection using film bulk acoustic resonators

AU - Wang, Ziyu

AU - Qiu, Xiaotun

AU - Shi, Jing

AU - Yu, Hongyu

PY - 2011/7

Y1 - 2011/7

N2 - This paper described an infrared (IR) radiation sensor based on Film Bulk Acoustic Resonator (FBAR). The resonant frequency of the FBAR decreased linearly when there was IR (peak wavelength at 780 nm) illumination on the device. The sensing mechanism was attributed to the temperature-dependent Young's modulus of the resonator material (ZnO), which subsequently shifted the resonant frequency. The noise equivalent temperature difference (NETD) and the detection limit for 780 nm IR were 16 mK at 25 °C and 2.9 μW/mm2, respectively. This study has proven the feasibility of detecting IR using ZnO film based FBAR.

AB - This paper described an infrared (IR) radiation sensor based on Film Bulk Acoustic Resonator (FBAR). The resonant frequency of the FBAR decreased linearly when there was IR (peak wavelength at 780 nm) illumination on the device. The sensing mechanism was attributed to the temperature-dependent Young's modulus of the resonator material (ZnO), which subsequently shifted the resonant frequency. The noise equivalent temperature difference (NETD) and the detection limit for 780 nm IR were 16 mK at 25 °C and 2.9 μW/mm2, respectively. This study has proven the feasibility of detecting IR using ZnO film based FBAR.

KW - Film bulk acoustic resonator

KW - Infrared radiation

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JO - Micro and Nanosystems

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Infrared detection using film bulk acoustic resonators

Abstract

Keywords

ASJC Scopus subject areas

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