Influence of Joule heating during electromigration evaluation of silver lines

Terry Alford; E. Misra; S. K. Bhagat; J. W. Mayer

doi:10.1016/j.tsf.2008.08.196

Influence of Joule heating during electromigration evaluation of silver lines

Terry Alford, E. Misra, S. K. Bhagat, J. W. Mayer

Research output: Contribution to journal › Article › peer-review

19 Scopus citations

Abstract

In the present study, the kinetics and failure mechanism of silver (Ag) thin film metallization have been determined under various temperature conditions. Failure was due to evaporation of metal assisted by agglomeration. The effect of Joule heating on the activation energy (E_a) for failure is determined. The Ag metallization appears to experience bimodal failure (0.46 and 0.89 eV) when Joule heating effect is not considered. However, upon incorporation of the temperature rise due to Joule heating, the E_a is determined to be 0.51 eV indicating a single failure mechanism.

Original language	English (US)
Pages (from-to)	1833-1836
Number of pages	4
Journal	Thin Solid Films
Volume	517
Issue number	5
DOIs	https://doi.org/10.1016/j.tsf.2008.08.196
State	Published - Jan 1 2009

Keywords

Aluminum
Electromigration
Joule heating
Metallization
Silver

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/j.tsf.2008.08.196

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title = "Influence of Joule heating during electromigration evaluation of silver lines",

abstract = "In the present study, the kinetics and failure mechanism of silver (Ag) thin film metallization have been determined under various temperature conditions. Failure was due to evaporation of metal assisted by agglomeration. The effect of Joule heating on the activation energy (Ea) for failure is determined. The Ag metallization appears to experience bimodal failure (0.46 and 0.89 eV) when Joule heating effect is not considered. However, upon incorporation of the temperature rise due to Joule heating, the Ea is determined to be 0.51 eV indicating a single failure mechanism.",

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T1 - Influence of Joule heating during electromigration evaluation of silver lines

AU - Alford, Terry

AU - Misra, E.

AU - Bhagat, S. K.

AU - Mayer, J. W.

PY - 2009/1/1

Y1 - 2009/1/1

N2 - In the present study, the kinetics and failure mechanism of silver (Ag) thin film metallization have been determined under various temperature conditions. Failure was due to evaporation of metal assisted by agglomeration. The effect of Joule heating on the activation energy (Ea) for failure is determined. The Ag metallization appears to experience bimodal failure (0.46 and 0.89 eV) when Joule heating effect is not considered. However, upon incorporation of the temperature rise due to Joule heating, the Ea is determined to be 0.51 eV indicating a single failure mechanism.

AB - In the present study, the kinetics and failure mechanism of silver (Ag) thin film metallization have been determined under various temperature conditions. Failure was due to evaporation of metal assisted by agglomeration. The effect of Joule heating on the activation energy (Ea) for failure is determined. The Ag metallization appears to experience bimodal failure (0.46 and 0.89 eV) when Joule heating effect is not considered. However, upon incorporation of the temperature rise due to Joule heating, the Ea is determined to be 0.51 eV indicating a single failure mechanism.

KW - Aluminum

KW - Electromigration

KW - Joule heating

KW - Metallization

KW - Silver

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JO - Thin Solid Films

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ER -

Influence of Joule heating during electromigration evaluation of silver lines

Abstract

Keywords

ASJC Scopus subject areas

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