Inert gas jets for growth control in electron beam induced deposition

M. R. Henry, S. Kim, K. Rykaczewski, A. G. Fedorov

Research output: Contribution to journalArticle

10 Scopus citations

Abstract

An inert, precursor free, argon jet is used to control the growth rate of electron beam induced deposition. Adjustment of the jet kinetic energy/inlet temperature can selectively increase surface diffusion to greatly enhance the deposition rate or deplete the surface precursor due to impact-stimulated desorption to minimize the deposition or completely clean the surface. Physical mechanisms for this process are described. While the electron beam is also observed to generate plasma upon interaction with an argon jet, our results indicate that plasma does not substantially contribute to the enhanced deposition rate.

Original languageEnglish (US)
Article number263109
JournalApplied Physics Letters
Volume98
Issue number26
DOIs
StatePublished - Jun 27 2011
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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