Inert gas clusters ejected from bursting bubbles during sputtering

Klaus Franzreb, Peter Williams

Research output: Contribution to journalArticle

15 Scopus citations

Abstract

The emission and ion formation mechanisms leading to the observation of Arn+(n≤6) and Xe2+ from sputtered surfaces and show that these species arise from expansion cooling of gas from ruptured bubbles producing neutral clusters, followed by gas-phase ionization by resonant charge exchange. Laurent et al. first observed Arn+ in a secondary ion mass spectrometry (SIMS) study of Ar+-sputtered heated A1 and noted that cluster ion formation must be due to rupture of bubbles during material removal by sputtering.

Original languageEnglish (US)
Article number015501
Pages (from-to)015501/1-015501/4
JournalPhysical Review Letters
Volume91
Issue number1
StatePublished - Jul 4 2003

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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