Independent N and P process monitors for body bias based process corner correction

Lawrence T. Clark, David Kidd, Vineet Agrawal, Sam Leshner, Gokul Krishnan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

Process monitors that independently sense on-die PMOS and NMOS as-fabricated performance are presented. The monitors provide digital outputs, making them easily integrated blocks on SOC designs. We present two monitor approaches, one primarily analog and one primarily digital, applied to both logic circuits and SRAM, which may require different optimal body biases for best operation. The monitors correctly sense the die as-fabricated process corners on 55-nm test die, demonstrated on FF, FS, TT, SF SS corner skew lots. Experimentally measured performance and power correction is demonstrated for digital circuits, as well as parametric yield correction for SRAMs. Logic ring oscillators demonstrate 74% reduction in standard deviation for delay and leakage with monitor specified body biases. Similar improvement is demonstrated on embedded microprocessors. Finally, 55% and 72% reduction in SRAM read current variability and leakage, respectively, is also shown.

Original languageEnglish (US)
Title of host publicationProceedings of the IEEE 2014 Custom Integrated Circuits Conference, CICC 2014
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781479932863
DOIs
StatePublished - Nov 4 2014
Event36th Annual Custom Integrated Circuits Conference - The Showcase for Integrated Circuit Design in the Heart of Silicon Valley, CICC 2014 - San Jose, United States
Duration: Sep 15 2014Sep 17 2014

Publication series

NameProceedings of the IEEE 2014 Custom Integrated Circuits Conference, CICC 2014

Other

Other36th Annual Custom Integrated Circuits Conference - The Showcase for Integrated Circuit Design in the Heart of Silicon Valley, CICC 2014
CountryUnited States
CitySan Jose
Period9/15/149/17/14

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Independent N and P process monitors for body bias based process corner correction'. Together they form a unique fingerprint.

Cite this