Fingerprint
Dive into the research topics of 'Increasing throughput in low pressure chemical vapor deposition: an optimal control approach'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Increasing throughput in low pressure chemical vapor deposition: an optimal control approach
Timothy S. Cale, Peter E. Crouch, Lijuan Song, Konstantinos Tsakalis
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
3
Scopus
citations