Increased medium-range order in amorphous silicon with increased substrate temperature

P. M. Voyles, J. E. Gerbi, M. M.J. Treacy, J. M. Gibson, J. R. Abelson

Research output: Contribution to journalConference article

25 Scopus citations

Abstract

Using fluctuation electron microscopy, we have measured the medium-range order of magnetron sputtered silicon thin films as a function of substrate temperature from the amorphous to polycrystalline regimes. We find a smooth increase in the medium-range order of the samples, which we interpret in the context of the paracrystalline structural model as an increase in the size of and/or volume fraction occupied by the paracrystalline grains. These data are counter to the long-standing belief that there is a sharp transition between amorphous and polycrystalline structures as a function of substrate temperature.

Original languageEnglish (US)
Pages (from-to)45-52
Number of pages8
JournalJournal of Non-Crystalline Solids
Volume293-295
Issue number1
DOIs
StatePublished - Nov 1 2001
Externally publishedYes
Event8th International Conference on Non-Cristalline Materials (NCM-8) - Aberystwyth, United Kingdom
Duration: Aug 6 2000Aug 11 2000

    Fingerprint

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Condensed Matter Physics
  • Materials Chemistry

Cite this