TY - JOUR
T1 - Increased medium-range order in amorphous silicon with increased substrate temperature
AU - Voyles, P. M.
AU - Gerbi, J. E.
AU - Treacy, M. M.J.
AU - Gibson, J. M.
AU - Abelson, J. R.
N1 - Funding Information:
We thank Peggy Bisher for technical assistance. P.M.V. acknowledges the support of the National Science Foundation under grant DMR 97-03906. J.E.G. and J.R.A. acknowledge the support of the National Renewable Energy Laboratory under subcontract ADD-9-18668.
PY - 2001/11
Y1 - 2001/11
N2 - Using fluctuation electron microscopy, we have measured the medium-range order of magnetron sputtered silicon thin films as a function of substrate temperature from the amorphous to polycrystalline regimes. We find a smooth increase in the medium-range order of the samples, which we interpret in the context of the paracrystalline structural model as an increase in the size of and/or volume fraction occupied by the paracrystalline grains. These data are counter to the long-standing belief that there is a sharp transition between amorphous and polycrystalline structures as a function of substrate temperature.
AB - Using fluctuation electron microscopy, we have measured the medium-range order of magnetron sputtered silicon thin films as a function of substrate temperature from the amorphous to polycrystalline regimes. We find a smooth increase in the medium-range order of the samples, which we interpret in the context of the paracrystalline structural model as an increase in the size of and/or volume fraction occupied by the paracrystalline grains. These data are counter to the long-standing belief that there is a sharp transition between amorphous and polycrystalline structures as a function of substrate temperature.
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U2 - 10.1016/S0022-3093(01)00652-4
DO - 10.1016/S0022-3093(01)00652-4
M3 - Conference article
AN - SCOPUS:0035500714
SN - 0022-3093
VL - 293-295
SP - 45
EP - 52
JO - Journal of Non-Crystalline Solids
JF - Journal of Non-Crystalline Solids
IS - 1
T2 - 8th International Conference on Non-Cristalline Materials (NCM-8)
Y2 - 6 August 2000 through 11 August 2000
ER -