In-situ x-ray studies of compositional control during synthesis of LaGaO3 by radio frequency-magnetron sputtering

Matthew J. Highland, Dillon D. Fong, Guangxu Ju, Carol Thompson, Peter M. Baldo, Paul H. Fuoss, Jeffrey A. Eastman

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

In-situ synchrotron x-ray scattering has been used to monitor and control the synthesis of LaGaO3 epitaxial thin films by 90 ° off-axis RF-magnetron sputtering. Films deposited from a single LaGaO3 source were compared with those prepared by alternating deposition from separate La2O3 and Ga2O3 sources. The conditions for growth of stoichiometric films were determined by real-time monitoring of secondary phase formation as well as from features in the diffuse scatter from island formation during synthesis. These results provide atomic-scale insight into the mechanisms taking place during reactive epitaxial growth and demonstrate how in-situ techniques can be utilized to achieve stoichiometric control in ultrathin films.

Original languageEnglish (US)
Article number081606
JournalApplied Physics Letters
Volume107
Issue number8
DOIs
StatePublished - Aug 24 2015
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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