In-situ x-ray studies of compositional control during synthesis of LaGaO3 by radio frequency-magnetron sputtering

Matthew J. Highland, Dillon D. Fong, Guangxu Ju, Carol Thompson, Peter M. Baldo, Paul H. Fuoss, Jeffrey A. Eastman

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

In-situ synchrotron x-ray scattering has been used to monitor and control the synthesis of LaGaO3 epitaxial thin films by 90 ° off-axis RF-magnetron sputtering. Films deposited from a single LaGaO3 source were compared with those prepared by alternating deposition from separate La2O3 and Ga2O3 sources. The conditions for growth of stoichiometric films were determined by real-time monitoring of secondary phase formation as well as from features in the diffuse scatter from island formation during synthesis. These results provide atomic-scale insight into the mechanisms taking place during reactive epitaxial growth and demonstrate how in-situ techniques can be utilized to achieve stoichiometric control in ultrathin films.

Original languageEnglish (US)
Article number081606
JournalApplied Physics Letters
Volume107
Issue number8
DOIs
StatePublished - Aug 24 2015
Externally publishedYes

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radio frequencies
magnetron sputtering
synthesis
x rays
x ray scattering
synchrotrons
thin films

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Highland, M. J., Fong, D. D., Ju, G., Thompson, C., Baldo, P. M., Fuoss, P. H., & Eastman, J. A. (2015). In-situ x-ray studies of compositional control during synthesis of LaGaO3 by radio frequency-magnetron sputtering. Applied Physics Letters, 107(8), [081606]. https://doi.org/10.1063/1.4929753

In-situ x-ray studies of compositional control during synthesis of LaGaO3 by radio frequency-magnetron sputtering. / Highland, Matthew J.; Fong, Dillon D.; Ju, Guangxu; Thompson, Carol; Baldo, Peter M.; Fuoss, Paul H.; Eastman, Jeffrey A.

In: Applied Physics Letters, Vol. 107, No. 8, 081606, 24.08.2015.

Research output: Contribution to journalArticle

Highland, MJ, Fong, DD, Ju, G, Thompson, C, Baldo, PM, Fuoss, PH & Eastman, JA 2015, 'In-situ x-ray studies of compositional control during synthesis of LaGaO3 by radio frequency-magnetron sputtering', Applied Physics Letters, vol. 107, no. 8, 081606. https://doi.org/10.1063/1.4929753
Highland, Matthew J. ; Fong, Dillon D. ; Ju, Guangxu ; Thompson, Carol ; Baldo, Peter M. ; Fuoss, Paul H. ; Eastman, Jeffrey A. / In-situ x-ray studies of compositional control during synthesis of LaGaO3 by radio frequency-magnetron sputtering. In: Applied Physics Letters. 2015 ; Vol. 107, No. 8.
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