In situ X-ray reflectivity measurements on annealed In_xGa _1-xN epilayer grown by metalorganic vapor phase epitaxy

Engineering & Materials Science

• Metallorganic vapor phase epitaxy 100%
• Epilayers 96%
• X rays 51%
• Annealing 42%
• Hot Temperature 20%
• Diffractometers 19%
• Sapphire 18%
• Atomic force microscopy 18%
• Optical properties 17%
• Pyrolysis 13%
• Decomposition 10%
• Microstructure 9%

Physics & Astronomy

• vapor phase epitaxy 59%
• reflectance 39%
• templates 26%
• x rays 25%
• annealing 25%
• thermal decomposition 15%
• diffractometers 15%
• sapphire 12%
• atomic force microscopy 10%
• decomposition 10%
• optical properties 9%
• microstructure 8%